Ultraviolet-extended real-time spectroscopic ellipsometry for characterization of phase evolution in BN thin films

2001 ◽  
Vol 78 (14) ◽  
pp. 1982-1984 ◽  
Author(s):  
J. A. Zapien ◽  
R. Messier ◽  
R. W. Collins
Keyword(s):  
Thin Films ◽  
Real Time ◽  
Spectroscopic Ellipsometry ◽  
Phase Evolution

Real time characterization of hydrogenation mechanism of palladium thin films by in situ spectroscopic ellipsometry

2009 ◽  
Vol 106 (1) ◽  
pp. 013523 ◽  
Author(s):  
Y. Yamada ◽  
K. Tajima ◽  
S. Bao ◽  
M. Okada ◽  
A. Roos ◽  
...  
Keyword(s):  
Thin Films ◽  
Real Time ◽  
Spectroscopic Ellipsometry

Optical characterization of CuIn1−xGaxSe2 alloy thin films by spectroscopic ellipsometry

2003 ◽  
Vol 94 (2) ◽  
pp. 879-888 ◽  
Author(s):  
P. D. Paulson ◽  
R. W. Birkmire ◽  
W. N. Shafarman
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Optical Characterization

Characterization of SiN thin films with spectroscopic ellipsometry

1993 ◽  
Vol 185 (1-4) ◽  
pp. 342-347 ◽  
Author(s):  
J. Petalas ◽  
S. Logothetidis ◽  
A. Markwitz ◽  
E.C. Paloura ◽  
R.L. Johnson ◽  
...  
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry

Spectroscopic ellipsometry characterization of Er3+-dopedtitania thin films prepared by the sol-gel method

Optik ◽  
2001 ◽  
Vol 112 (7) ◽  
pp. 316-320 ◽  
Author(s):  
R. Palomino-Merino ◽  
A. Mendoza-Galván ◽  
G. Martínez ◽  
V. Castaño ◽  
R. Rodríguez
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Sol Gel ◽  
Gel Method ◽  
Sol Gel Method
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