Growth process conditions of vertically aligned carbon nanotubes using plasma enhanced chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.1410322 ◽

2001 ◽

Vol 90 (10) ◽

pp. 5308-5317 ◽

Author(s):

M. Chhowalla ◽

K. B. K. Teo ◽

C. Ducati ◽

N. L. Rupesinghe ◽

G. A. J. Amaratunga ◽

...

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Growth Process ◽

Chemical Vapor ◽

Process Conditions ◽

Vertically Aligned Carbon Nanotubes ◽

Aligned Carbon Nanotubes ◽

Vertically Aligned

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Controlling the diameter, growth rate, and density of vertically aligned carbon nanotubes synthesized by microwave plasma-enhanced chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.126348 ◽

2000 ◽

Vol 76 (17) ◽

pp. 2367-2369 ◽

Author(s):

Young Chul Choi ◽

Young Min Shin ◽

Young Hee Lee ◽

Byung Soo Lee ◽

Gyeong-Su Park ◽

...

Keyword(s):

Carbon Nanotubes ◽

Growth Rate ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Diameter Growth ◽

Vertically Aligned Carbon Nanotubes ◽

Aligned Carbon Nanotubes ◽

Vertically Aligned

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Quantitative elucidation of the rapid growth and growth saturation of millimeter-scale vertically aligned carbon nanotubes by hot-filament chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2011.01.317 ◽

2011 ◽

Vol 519 (14) ◽

pp. 4432-4436 ◽

Author(s):

Nguyen Tuan Hong ◽

Sang Yong Kim ◽

Ken Ha Koh ◽

Soonil Lee

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Rapid Growth ◽

Chemical Vapor ◽

Vertically Aligned Carbon Nanotubes ◽

Aligned Carbon Nanotubes ◽

Vertically Aligned ◽

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Dual-catalyst growth of vertically aligned carbon nanotubes at low temperature in thermal chemical vapor deposition

Chemical Physics Letters ◽

10.1016/s0009-2614(02)00904-1 ◽

2002 ◽

Vol 361 (3-4) ◽

pp. 189-195 ◽

Author(s):

Hee Jin Jeong ◽

Seung Yol Jeong ◽

Young Min Shin ◽

Jeong Ho Han ◽

Seong Chu Lim ◽

...

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Vertically Aligned Carbon Nanotubes ◽

Thermal Chemical Vapor Deposition ◽

Aligned Carbon Nanotubes ◽

Vertically Aligned

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Growth of vertically aligned carbon nanotubes on glass substrate at 450 °C through the thermal chemical vapor deposition method

Diamond and Related Materials ◽

10.1016/j.diamond.2008.09.001 ◽

2009 ◽

Vol 18 (2-3) ◽

pp. 307-311 ◽

Author(s):

Tsung-Yen Tsai ◽

Nyan-Hwa Tai ◽

K.C. Chen ◽

S.H. Lee ◽

L.H. Chan ◽

...

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Vertically Aligned Carbon Nanotubes ◽

Thermal Chemical Vapor Deposition ◽

Aligned Carbon Nanotubes ◽

Vertically Aligned

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Controlled density of vertically aligned carbon nanotubes in a triode plasma chemical vapor deposition system

Thin Solid Films ◽

10.1016/j.tsf.2006.03.056 ◽

2006 ◽

Vol 515 (4) ◽

pp. 1380-1384 ◽

Author(s):

Sung Hoon Lim ◽

Kyu Chang Park ◽

Jong Hyun Moon ◽

Hyun Sik Yoon ◽

Didier Pribat ◽

...

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Plasma Chemical ◽

Vertically Aligned Carbon Nanotubes ◽

Plasma Chemical Vapor Deposition ◽

Aligned Carbon Nanotubes ◽

Vertically Aligned

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Direct growth of vertically aligned carbon nanotubes on stainless steel by plasma enhanced chemical vapor deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2018.10.012 ◽

2018 ◽

Vol 90 ◽

pp. 144-153 ◽

Author(s):

Arun Thapa ◽

Suman Neupane ◽

Rui Guo ◽

Katherine L. Jungjohann ◽

Doug Pete ◽

...

Keyword(s):

Carbon Nanotubes ◽

Stainless Steel ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Vertically Aligned Carbon Nanotubes ◽

Aligned Carbon Nanotubes ◽

Direct Growth ◽

Vertically Aligned

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Field Emission Properties of Vertically-Aligned Carbon Nanotubes Grown on Stainless Steel by Hot-Filament Chemical Vapor Deposition

MATERIALS TRANSACTIONS ◽

10.2320/matertrans.mt-mn2019046 ◽

2020 ◽

Vol 61 (8) ◽

pp. 1555-1559

Author(s):

Nguyen Khac Hiep ◽

Dang Nhat Minh ◽

Nguyen Thanh Hai ◽

Nguyen Dinh Dung ◽

Luong Nhu Hai ◽

...

Keyword(s):

Carbon Nanotubes ◽

Stainless Steel ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Vertically Aligned Carbon Nanotubes ◽

Field Emission Properties ◽

Aligned Carbon Nanotubes ◽

Vertically Aligned ◽

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Fabrication of vertically aligned carbon nanotubes patterns by chemical vapor deposition for field emitters

Diamond and Related Materials ◽

10.1016/s0925-9635(02)00110-3 ◽

2002 ◽

Vol 11 (9) ◽

pp. 1638-1642 ◽

Author(s):

W.D Zhang ◽

J.T.L Thong ◽

W.C Tjiu ◽

L.M Gan

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Vertically Aligned Carbon Nanotubes ◽

Field Emitters ◽

Aligned Carbon Nanotubes ◽

Vertically Aligned

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Fast Growth of Millimeter-Long Vertically-Aligned Carbon Nanotubes via Hot Filament Chemical Vapor Deposition

Journal of the Korean Physical Society ◽

10.3938/jkps.53.3603 ◽

2008 ◽

Vol 53 (9(6)) ◽

pp. 3603-3607 ◽

Author(s):

NguyenTuan Hong ◽

KenHa Koh ◽

Soonil Lee

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Fast Growth ◽

Vertically Aligned Carbon Nanotubes ◽

Aligned Carbon Nanotubes ◽

Vertically Aligned ◽

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Role of Negative Electric Field Biasing on Growth of Vertically Aligned Carbon Nanotubes Using Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.47.7436 ◽

2008 ◽

Vol 47 (9) ◽

pp. 7436-7439 ◽

Author(s):

Takafumi Matsuda ◽

Marcel Mesko ◽

Tomokazu Ishikawa ◽

Jun Sato ◽

Akihisa Ogino ◽

...

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Electric Field ◽

Vapor Deposition ◽

Chemical Vapor ◽

Vertically Aligned Carbon Nanotubes ◽

Aligned Carbon Nanotubes ◽

Vertically Aligned ◽

Negative Electric Field

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