Quantum chemical study of the elementary reactions in zirconium oxide atomic layer deposition

2002 ◽  
Vol 81 (2) ◽  
pp. 304-306 ◽  
Author(s):  
Yuniarto Widjaja ◽  
Charles B. Musgrave
Keyword(s):  
Atomic Layer Deposition ◽  
Zirconium Oxide ◽  
Quantum Chemical ◽  
Quantum Chemical Study ◽  
Atomic Layer ◽  
Chemical Study ◽  
Elementary Reactions ◽  
Layer Deposition

A quantum chemical study of ZrO2 atomic layer deposition growth reactions on the SiO2 surface

2004 ◽  
Vol 550 (1-3) ◽  
pp. 199-212 ◽  
Author(s):  
Joseph H. Han ◽  
Guilian Gao ◽  
Yuniarto Widjaja ◽  
Eric Garfunkel ◽  
Charles B. Musgrave
Keyword(s):  
Atomic Layer Deposition ◽  
Quantum Chemical ◽  
Quantum Chemical Study ◽  
Atomic Layer ◽  
Chemical Study ◽  
Sio2 Surface ◽  
Layer Deposition

Effect of Hydrogen on Hafnium Zirconium Oxide Fabricated by Atomic Layer Deposition Using H 2 O 2 Oxidant

2021 ◽  
pp. 2100020
Author(s):  
Hyoungkyu Kim ◽  
Seokjung Yun ◽  
Tae Ho Kim ◽  
Hoon Kim ◽  
Changdeuck Bae ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Zirconium Oxide ◽  
Atomic Layer ◽  
Layer Deposition
Sign in / Sign up

Export Citation Format

Share Document