Fore-Vacuum Plasma Electron Gun of Ribbon Beam

2003 ◽  
Author(s):  
Viktor Burdovitsin
Keyword(s):  
Plasma Electron ◽  
Electron Gun ◽  
Vacuum Plasma ◽  
Ribbon Beam

Experimental study of miniature hollow cathode plasma electron gun

2010 ◽  
Vol 22 (1) ◽  
pp. 91-93
Author(s):  
李文旭 Li Wenxu ◽  
鄢扬 Yan Yang ◽  
傅文杰 Fu Wenjie ◽  
黎晓云 Li Xiaoyun ◽  
吴坚强 Wu Jianqiang
Keyword(s):  
Experimental Study ◽  
Hollow Cathode ◽  
Plasma Electron ◽  
Electron Gun ◽  
Cathode Plasma

Plasma electron source for generating a ribbon beam in the forevacuum pressure range

2020 ◽  
Vol 91 (4) ◽  
pp. 043505
Author(s):  
A. S. Klimov ◽  
I. Yu. Bakeev ◽  
E. M. Oks ◽  
V. T. Tran ◽  
A. A. Zenin
Keyword(s):  
Pressure Range ◽  
Plasma Electron ◽  
Electron Source ◽  
Plasma Electron Source ◽  
Ribbon Beam

Deposition of dielectric films on silicon using a fore-vacuum plasma electron source

2016 ◽  
Vol 87 (6) ◽  
pp. 063302 ◽  
Author(s):  
D. B. Zolotukhin ◽  
E. M. Oks ◽  
A. V. Tyunkov ◽  
Yu. G. Yushkov
Keyword(s):  
Plasma Electron ◽  
Electron Source ◽  
Dielectric Films ◽  
Vacuum Plasma ◽  
Plasma Electron Source

A Fore-Vacuum Plasma Electron Source of a Focused Electron Beam

2019 ◽  
Vol 83 (11) ◽  
pp. 1402-1406 ◽  
Author(s):  
I. Yu. Bakeev ◽  
A. S. Klimov ◽  
E. M. Oks ◽  
A. A. Zenin
Keyword(s):  
Electron Beam ◽  
Plasma Electron ◽  
Electron Source ◽  
Vacuum Plasma ◽  
Plasma Electron Source
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