Pulsed inductively coupled plasmas as a method to recoup uniformity: Three-dimensional modeling study
2002 ◽
Vol 20
(2)
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pp. 325-334
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1998 ◽
Vol 103
(D5)
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pp. 5747-5758
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2008 ◽
Vol 36
(4)
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pp. 1040-1041
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2002 ◽
Vol 20
(2)
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pp. 313-324
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1999 ◽
Vol 27
(5)
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pp. 1297-1309
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2019 ◽
Vol 62
(4)
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pp. 802-814
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Keyword(s):
2000 ◽
Vol 105
(D2)
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pp. 1947-1956
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2015 ◽
Vol 177-178
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pp. 107-121
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1995 ◽
Vol 52
(10)
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pp. 1539-1554
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