Pulsed inductively coupled plasmas as a method to recoup uniformity: Three-dimensional modeling study

2004 ◽  
Vol 85 (5) ◽  
pp. 721-723 ◽  
Author(s):  
Pramod Subramonium ◽  
Mark J. Kushner
1998 ◽  
Vol 103 (D5) ◽  
pp. 5747-5758 ◽  
Author(s):  
V. R. Kotamarthi ◽  
J. M. Rodriguez ◽  
M. K. W. Ko ◽  
T. K. Tromp ◽  
N. D. Sze ◽  
...  

2000 ◽  
Vol 105 (D2) ◽  
pp. 1947-1956 ◽  
Author(s):  
C. Giannakopoulos ◽  
M. P. Chipperfield ◽  
K. S. Law ◽  
P.-H. Plantevin ◽  
J. A. Pyle ◽  
...  

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