Consequences of asymmetric pumping in low pressure plasma processing reactors: A three-dimensional modeling study

1997 ◽  
Vol 82 (11) ◽  
pp. 5312-5320 ◽  
Author(s):  
Mark J. Kushner
1998 ◽  
Vol 103 (D5) ◽  
pp. 5747-5758 ◽  
Author(s):  
V. R. Kotamarthi ◽  
J. M. Rodriguez ◽  
M. K. W. Ko ◽  
T. K. Tromp ◽  
N. D. Sze ◽  
...  

Author(s):  
Alibi Baitukha ◽  
Iman Al-Dybiat ◽  
Azadeh Valinataj-Omran ◽  
Jerome Pulpytel ◽  
Marc Pocard ◽  
...  

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