Consequences of asymmetric pumping in low pressure plasma processing reactors: A three-dimensional modeling study
Keyword(s):
Keyword(s):
1998 ◽
Vol 103
(D5)
◽
pp. 5747-5758
◽
2017 ◽
Vol 708
◽
pp. 1124-1130
◽
2018 ◽
Vol 07
(06)
◽
Keyword(s):
2015 ◽
Vol 13
(1)
◽
pp. 10-18
◽
Keyword(s):
2019 ◽
Vol 62
(4)
◽
pp. 802-814
◽
Keyword(s):