Kinetic two-dimensional modeling of inductively coupled plasmas based on a hybrid kinetic approach
1999 ◽
Vol 27
(5)
◽
pp. 1297-1309
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2002 ◽
Vol 20
(2)
◽
pp. 325-334
◽
2002 ◽
Vol 20
(2)
◽
pp. 313-324
◽
2006 ◽
Vol 83
(2)
◽
pp. 328-335
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