scholarly journals High-repetition-rate (6kHz) and long-pulse-duration (50ns) ArF excimer laser for sub-65nm lithography

2006 ◽  
Vol 77 (3) ◽  
pp. 035109 ◽  
Author(s):  
Koji Kakizaki ◽  
Yoichi Sasaki ◽  
Toyoharu Inoue ◽  
Yosuke Sakai
Keyword(s):  
Pulse Duration ◽  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Arf Excimer Laser ◽  
Long Pulse

High-repetition-rate ArF excimer laser for microlithography

2000 ◽  
Author(s):  
Osamu Wakabayashi ◽  
Tatsuo Enami ◽  
Ken Ishii ◽  
Katsutomo Terashima ◽  
Yasuo Itakura ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Arf Excimer Laser

Ultrahigh-repetition-rate ArF excimer laser with long pulse duration for 193-nm lithography

2001 ◽  
Author(s):  
Kouji Kakizaki ◽  
Takashi Matsunaga ◽  
Yoichi Sasaki ◽  
Toyoharu Inoue ◽  
Satoshi Tanaka ◽  
...  
Keyword(s):  
Pulse Duration ◽  
Excimer Laser ◽  
Repetition Rate ◽  
Arf Excimer Laser ◽  
193 Nm ◽  
Long Pulse

High repetition rate operation of a long pulse excimer laser

1994 ◽  
Vol 64 (6) ◽  
pp. 679-680 ◽  
Author(s):  
Yukio Sato ◽  
Mitsuo Inoue ◽  
Kenyu Haruta ◽  
Haruhiko Nagai ◽  
Yutaka Murai
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Pulse Excimer Laser ◽  
Long Pulse

High-repetition-rate ArF excimer laser for 193-nm lithography

2000 ◽  
Author(s):  
Kouji Kakizaki ◽  
Takashi Saito ◽  
Ken-ichi Mitsuhashi ◽  
Motohiro Arai ◽  
Akifumi Tada ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Arf Excimer Laser ◽  
193 Nm

5 kHz high repetition rate and high power XeCl excimer laser

1995 ◽  
Vol 66 (11) ◽  
pp. 5162-5164 ◽  
Author(s):  
Tatsumi Goto ◽  
Koji Kakizaki ◽  
Shigeyuki Takagi ◽  
Noboru Okamoto ◽  
Saburo Sato ◽  
...  
Keyword(s):  
Excimer Laser ◽  
High Power ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Xecl Excimer Laser
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