Reduction of Acoustic Waves Induced by Discharge in High Repetition Rate ArF Excimer Laser Cavity to Obtain Narrow-Bandwidth Laser Light

2006 ◽  
Vol 45 (10A) ◽  
pp. 7719-7723 ◽  
Author(s):  
Koji Kakizaki ◽  
Takayuki Yabu ◽  
Tsukasa Hori ◽  
Hakaru Mizoguchi ◽  
Yosuke Sakai
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
Acoustic Waves ◽  
Laser Light ◽  
Laser Cavity ◽  
High Repetition Rate ◽  
High Repetition ◽  
Narrow Bandwidth ◽  
Arf Excimer Laser

High-repetition-rate ArF excimer laser for microlithography

2000 ◽  
Author(s):  
Osamu Wakabayashi ◽  
Tatsuo Enami ◽  
Ken Ishii ◽  
Katsutomo Terashima ◽  
Yasuo Itakura ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Arf Excimer Laser

High-repetition-rate KrF lithography excimer laser with narrow bandwidth below 2 pm

1990 ◽  
Author(s):  
Peter Lokai ◽  
Ulrich Rebhan ◽  
Peter Oesterlin ◽  
Hans-Juergen Kahlert ◽  
Dirk Basting
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Narrow Bandwidth

High-repetition-rate ArF excimer laser for 193-nm lithography

2000 ◽  
Author(s):  
Kouji Kakizaki ◽  
Takashi Saito ◽  
Ken-ichi Mitsuhashi ◽  
Motohiro Arai ◽  
Akifumi Tada ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Arf Excimer Laser ◽  
193 Nm

5 kHz high repetition rate and high power XeCl excimer laser

1995 ◽  
Vol 66 (11) ◽  
pp. 5162-5164 ◽  
Author(s):  
Tatsumi Goto ◽  
Koji Kakizaki ◽  
Shigeyuki Takagi ◽  
Noboru Okamoto ◽  
Saburo Sato ◽  
...  
Keyword(s):  
Excimer Laser ◽  
High Power ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Xecl Excimer Laser
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