scholarly journals Nanoscale perpendicular magnetic island arrays fabricated by extreme ultraviolet interference lithography

2008 ◽  
Vol 92 (10) ◽  
pp. 102505 ◽  
Author(s):  
F. Luo ◽  
L. J. Heyderman ◽  
H. H. Solak ◽  
T. Thomson ◽  
M. E. Best
Keyword(s):  
Extreme Ultraviolet ◽  
Interference Lithography ◽  
Magnetic Island

Fabrication of Thiol–Ene “Clickable” Copolymer-Brush Nanostructures on Polymeric Substrates via Extreme Ultraviolet Interference Lithography

2015 ◽  
Vol 7 (21) ◽  
pp. 11337-11345 ◽  
Author(s):  
Matthias Dübner ◽  
Tugce N. Gevrek ◽  
Amitav Sanyal ◽  
Nicholas D. Spencer ◽  
Celestino Padeste
Keyword(s):  
Extreme Ultraviolet ◽  
Interference Lithography ◽  
Polymeric Substrates ◽  
Copolymer Brush

scholarly journals Generation of high-resolution kagome lattice structures using extreme ultraviolet interference lithography

2012 ◽  
Vol 101 (9) ◽  
pp. 093104 ◽  
Author(s):  
Li Wang ◽  
Bernd Terhalle ◽  
Vitaliy A. Guzenko ◽  
Alan Farhan ◽  
Mohamad Hojeij ◽  
...  
Keyword(s):  
High Resolution ◽  
Extreme Ultraviolet ◽  
Interference Lithography ◽  
Lattice Structures ◽  
Kagome Lattice ◽  
Kagomé Lattice

Hybrid application of laser-focused atomic deposition and extreme ultraviolet interference lithography methods for manufacturing of self-traceable nanogratings

2021 ◽  
Vol 32 (17) ◽  
pp. 175301
Author(s):  
Jie Liu ◽  
Jun Zhao ◽  
Xiao Deng ◽  
Shumin Yang ◽  
Chaofan Xue ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Interference Lithography

Fabrication of transmission gratings for extreme ultraviolet interference lithography

2008 ◽  
Author(s):  
Jie Ma ◽  
Xiaoli Zhu ◽  
Weizhong Zhu ◽  
Changqing Xie ◽  
Tianchun Ye ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Interference Lithography
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