Large area interference lithography using a table-top extreme ultraviolet laser: a systematic study of the degree of mutual coherence

2009 ◽  
Vol 20 (11) ◽  
pp. 115303 ◽  
Author(s):  
P Zuppella ◽  
D Luciani ◽  
P Tucceri ◽  
P De Marco ◽  
A Gaudieri ◽  
...  
Keyword(s):  
Systematic Study ◽  
Extreme Ultraviolet ◽  
Interference Lithography ◽  
Large Area ◽  
Mutual Coherence ◽  
Ultraviolet Laser

scholarly journals Nanoscale perpendicular magnetic island arrays fabricated by extreme ultraviolet interference lithography

2008 ◽  
Vol 92 (10) ◽  
pp. 102505 ◽  
Author(s):  
F. Luo ◽  
L. J. Heyderman ◽  
H. H. Solak ◽  
T. Thomson ◽  
M. E. Best
Keyword(s):  
Extreme Ultraviolet ◽  
Interference Lithography ◽  
Magnetic Island

scholarly journals Nanoimaging with a compact extreme-ultraviolet laser

2005 ◽  
Vol 30 (16) ◽  
pp. 2095 ◽  
Author(s):  
G. Vaschenko ◽  
F. Brizuela ◽  
C. Brewer ◽  
M. Grisham ◽  
H. Mancini ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Ultraviolet Laser

Fabrication of Thiol–Ene “Clickable” Copolymer-Brush Nanostructures on Polymeric Substrates via Extreme Ultraviolet Interference Lithography

2015 ◽  
Vol 7 (21) ◽  
pp. 11337-11345 ◽  
Author(s):  
Matthias Dübner ◽  
Tugce N. Gevrek ◽  
Amitav Sanyal ◽  
Nicholas D. Spencer ◽  
Celestino Padeste
Keyword(s):  
Extreme Ultraviolet ◽  
Interference Lithography ◽  
Polymeric Substrates ◽  
Copolymer Brush

Fabrication of metallic micropatterns using table top extreme ultraviolet laser interferometric lithography

2008 ◽  
Vol 17 (2) ◽  
pp. 024019 ◽  
Author(s):  
L Ottaviano ◽  
F Bussolotti ◽  
S Piperno ◽  
M Rinaldi ◽  
S Santucci ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Ultraviolet Laser ◽  
Interferometric Lithography ◽  
Laser Interferometric

scholarly journals Extreme-ultraviolet laser metrology of O i transitions

2008 ◽  
Vol 389 (1) ◽  
pp. L4-L7 ◽  
Author(s):  
T. I. Ivanov ◽  
E. J. Salumbides ◽  
M. O. Vieitez ◽  
P. C. Cacciani ◽  
C. A. de Lange ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Ultraviolet Laser ◽  
Laser Metrology

scholarly journals Generation of high-resolution kagome lattice structures using extreme ultraviolet interference lithography

2012 ◽  
Vol 101 (9) ◽  
pp. 093104 ◽  
Author(s):  
Li Wang ◽  
Bernd Terhalle ◽  
Vitaliy A. Guzenko ◽  
Alan Farhan ◽  
Mohamad Hojeij ◽  
...  
Keyword(s):  
High Resolution ◽  
Extreme Ultraviolet ◽  
Interference Lithography ◽  
Lattice Structures ◽  
Kagome Lattice ◽  
Kagomé Lattice

Hybrid application of laser-focused atomic deposition and extreme ultraviolet interference lithography methods for manufacturing of self-traceable nanogratings

2021 ◽  
Vol 32 (17) ◽  
pp. 175301
Author(s):  
Jie Liu ◽  
Jun Zhao ◽  
Xiao Deng ◽  
Shumin Yang ◽  
Chaofan Xue ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Interference Lithography
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