The effect of added hydrogen on the rf discharge chemistry of CF4, CF3H, and C2F6

1979 ◽  
Vol 50 (11) ◽  
pp. 6594-6599 ◽  
Author(s):  
E. A. Truesdale ◽  
G. Smolinsky
Keyword(s):  
Rf Discharge ◽  
Discharge Chemistry

IMPORTANT CONSIDERATIONS FOR OPTIMIZING PRODUCTION RATES IN RF DISCHARGE CHEMISTRY

1987 ◽  
pp. 334-342 ◽  
Author(s):  
Mark J. Kushner ◽  
Alan Garscadden
Keyword(s):  
Rf Discharge ◽  
Production Rates ◽  
Discharge Chemistry

The effect of added acetylene on the rf discharge chemistry of C2F6. A mechanistic model for fluorocarbon plasmas

1980 ◽  
Vol 51 (5) ◽  
pp. 2909 ◽  
Author(s):  
E. A. Truesdale ◽  
G. Smolinsky ◽  
T. M. Mayer
Keyword(s):  
Mechanistic Model ◽  
Rf Discharge ◽  
Fluorocarbon Plasmas ◽  
Discharge Chemistry

A Prototype of Electric Discharge Gas-Flow Oxygen–Iodine Laser: 2. Simulation of the Parameters of the Active Medium Formed in a Gas-Flow Slab RF Discharge in O2 : He : CF3I Mixtures

2020 ◽  
Vol 46 (11) ◽  
pp. 1114-1123
Author(s):  
N. P. Vagin ◽  
A. A. Ionin ◽  
A. Yu. Kozlov ◽  
I. V. Kochetov ◽  
A. P. Napartovich ◽  
...  
Keyword(s):  
Active Medium ◽  
Electric Discharge ◽  
Gas Flow ◽  
Rf Discharge ◽  
Iodine Laser ◽  
Discharge Gas

Laser capabilities of CuBr mixture excited by RF discharge

2000 ◽  
Vol 8 (2) ◽  
pp. 277-286 ◽  
Author(s):  
M. Grozeva ◽  
M. Kocik ◽  
J. Mentel ◽  
J. Mizeraczyk ◽  
T. Petrov ◽  
...  
Keyword(s):  
Rf Discharge

scholarly journals Capacitively coupled rf discharge with a large amount of microparticles: Spatiotemporal emission pattern and microparticle arrangement

2017 ◽  
Vol 96 (3) ◽  
Author(s):  
M. Y. Pustylnik ◽  
I. L. Semenov ◽  
E. Zähringer ◽  
H. M. Thomas
Keyword(s):  
Rf Discharge ◽  
Emission Pattern ◽  
Capacitively Coupled

scholarly journals Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model

2010 ◽  
Vol 43 (50) ◽  
pp. 505203 ◽  
Author(s):  
Z Navrátil ◽  
P Dvořák ◽  
O Brzobohatý ◽  
D Trunec
Keyword(s):  
Electron Density ◽  
Rf Discharge ◽  
Capacitively Coupled ◽  
Electron Density And Temperature

Q-switched slab RF discharge CO laser

2017 ◽  
Vol 14 (5) ◽  
pp. 055001 ◽  
Author(s):  
A A Ionin ◽  
Yu V Kochetkov ◽  
A Yu Kozlov ◽  
D V Mokrousova ◽  
L V Seleznev ◽  
...  
Keyword(s):  
Rf Discharge ◽  
Co Laser

On the analysis of surface free energy of DLC coatings deposited in low pressure RF discharge

2004 ◽  
Vol 54 (S3) ◽  
pp. C877-C882 ◽  
Author(s):  
Z. Navrátil ◽  
V. Buršíková ◽  
P. St’ahel ◽  
M. Šíra ◽  
P. Zvěřina
Keyword(s):  
Free Energy ◽  
Surface Free Energy ◽  
Low Pressure ◽  
Rf Discharge ◽  
Dlc Coatings
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