scholarly journals Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model

2010 ◽  
Vol 43 (50) ◽  
pp. 505203 ◽  
Author(s):  
Z Navrátil ◽  
P Dvořák ◽  
O Brzobohatý ◽  
D Trunec
Keyword(s):  
Electron Density ◽  
Rf Discharge ◽  
Capacitively Coupled ◽  
Electron Density And Temperature

Time resolved electron density and temperature measurements on a capacitively coupled helium RF discharge

2002 ◽  
Vol 11 (4) ◽  
pp. 466-475 ◽  
Author(s):  
M J van de Sande ◽  
R H M Deckers ◽  
F Lepkojus ◽  
W Buscher ◽  
J J A M van der Mullen
Keyword(s):  
Electron Density ◽  
Temperature Measurements ◽  
Rf Discharge ◽  
Time Resolved ◽  
Capacitively Coupled ◽  
Electron Density And Temperature

scholarly journals Diagnostics of low-pressure capacitively coupled RF discharge argon plasma

2019 ◽  
Vol 13 (27) ◽  
pp. 76-82
Author(s):  
Kadhim A. Aadim
Keyword(s):  
Electron Temperature ◽  
Electron Density ◽  
Langmuir Probe ◽  
Gas Flow ◽  
Low Pressure ◽  
Gas Pressure ◽  
Rf Discharge ◽  
Electrode Gap ◽  
Probe Characteristic ◽  
Capacitively Coupled

Low-pressure capacitively coupled RF discharge Ar plasma has been studied using Langmuir probe. The electron temperature, electron density and Debay length were calculated under different pressures and electrode gap. In this work the RF Langmuir probe is designed using 4MHz filter as compensation circuit and I-V probe characteristic have been investigated. The pressure varied from 0.07 mbar to 0.1 mbar while electrode gap varied from 2-5 cm. The plasma was generated using power supply at 4MHz frequency with power 300 W. The flowmeter is used to control Argon gas flow in the range of 600 standard cubic centimeters per minute (sccm). The electron temperature drops slowly with pressure and it's gradually decreased when expanding the electrode gap. As the gas pressure increases, the plasma density rises slightly at low gas pressure while it drops little at higher gas pressure. The electron density decreases rapidly with expand distances between electrodes.

scholarly journals Observations of Infrared Fine-Structure Lines: [S III]

1978 ◽  
Vol 76 ◽  
pp. 126-126
Author(s):  
Lawrence T. Greenberg
Keyword(s):  
Fine Structure ◽  
Electron Density ◽  
Experimental Error ◽  
Column Density ◽  
Surface Brightness ◽  
Ngc 7027 ◽  
Structure Line ◽  
Electron Density And Temperature ◽  
Fine Structure Lines

Recent observations of the 18.7 ym fine-structure line of S++ in NGC 7027 and BD+30°3639 (Greenberg, Dyal and Geballe, 1977 Ap.J.(Letters), 213, L74) allow the first determination of an ionic column density in ionized nebulae. The line ratios 18.7 μm/A9532 and λ6312/λ9532, besides yielding both electron density and temperature in the S++ region, have been used to indicate that the fine-structure levels of S++ are collisionally saturated. In this case the 18.7 ym surface brightness directly measures the column density of S++ ions with little dependence upon nebular structure, the major uncertainty being the experimental error. This research has been partially supported by NASA Grants NGR 05-003-511 and NGL 05-003-272.

scholarly journals Axial Distribution of Electron Density in Capacitively Coupled RF Discharge Plasma

1998 ◽  
Vol 118 (7-8) ◽  
pp. 897-898
Author(s):  
Hiroaki Tada ◽  
Joji Maeda ◽  
Tadashi Terada ◽  
Sumio Kogoshi
Keyword(s):  
Electron Density ◽  
Discharge Plasma ◽  
Rf Discharge ◽  
Axial Distribution ◽  
Capacitively Coupled
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