Vacuum system set-up is presented and used for calibration of pressure gauges in the region of rough vacuum, from 103 mbar to 10-1 mbar, with dry air. The capacitance manometer is used for the calibration of piezoresistant manometer, oil, mercury and mercury micrometers U manometers. The applicability of the experimental set-up and obtained results for the low pressure gauges calibration in the medium and high vacuum region is approved. It was shown how calibration of some cheaper pressure gauges might be performed and reliable measurements of the pressure may be made in the region that is of interest for atomic and molecular collision physics and low-pressure gas discharges. It was also shown that mentioned calibration procedure could be used for calibration of different U manometer types in order to renormalize older atomic and molecular collision data.
Device for calibration of low pressure gauges development