Thin‐film hermeticity: A quantitative analysis of diamondlike carbon using variable angle spectroscopic ellipsometry

Journal of Applied Physics ◽

10.1063/1.341331 ◽

1988 ◽

Vol 64 (8) ◽

pp. 4175-4180 ◽

Author(s):

S. Orzeszko ◽

Bhola N. De ◽

John A. Woollam ◽

John J. Pouch ◽

Samuel A. Alterovitz ◽

...

Keyword(s):

Thin Film ◽

Quantitative Analysis ◽

Spectroscopic Ellipsometry ◽

Variable Angle ◽

Diamondlike Carbon ◽

Variable Angle Spectroscopic Ellipsometry

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Sensitivity of variable angle spectroscopic ellipsometry to isotropic thin film properties

Thin Solid Films ◽

10.1016/s0040-6090(97)00670-6 ◽

1997 ◽

Vol 308-309 ◽

pp. 31-37 ◽

Author(s):

F.K. Urban III ◽

D. Barton

Keyword(s):

Thin Film ◽

Spectroscopic Ellipsometry ◽

Film Properties ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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Characterization of polycrystalline silicon thin-film multilayers by variable angle spectroscopic ellipsometry

Surface and Interface Analysis ◽

10.1002/sia.740180209 ◽

1992 ◽

Vol 18 (2) ◽

pp. 113-118 ◽

Author(s):

Paul G. Snyder ◽

Yi-Ming Xiong ◽

John A. Woollam ◽

Eric R. Krosche ◽

Yale Strausser

Keyword(s):

Thin Film ◽

Spectroscopic Ellipsometry ◽

Polycrystalline Silicon ◽

Silicon Thin Film ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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Nanostructure of GdF 3 thin film evaluated by variable angle spectroscopic ellipsometry

10.1117/12.677538 ◽

2006 ◽

Author(s):

Jue Wang ◽

Robert Maier ◽

Paul G. Dewa ◽

Horst Schreiber ◽

Robert A. Bellman ◽

...

Keyword(s):

Thin Film ◽

Spectroscopic Ellipsometry ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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Silicon nitride/silicon oxynitride/silicon dioxide thin film multilayer characterized by variable angle spectroscopic ellipsometry

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577884 ◽

1992 ◽

Vol 10 (4) ◽

pp. 950-954 ◽

Author(s):

Yi‐Ming Xiong ◽

Paul G. Snyder ◽

John A. Woollam ◽

Eric R. Krosche

Keyword(s):

Thin Film ◽

Silicon Nitride ◽

Silicon Dioxide ◽

Spectroscopic Ellipsometry ◽

Silicon Oxynitride ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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Nanoporous structure of a GdF_3 thin film evaluated by variable angle spectroscopic ellipsometry

Applied Optics ◽

10.1364/ao.46.003221 ◽

2007 ◽

Vol 46 (16) ◽

pp. 3221 ◽

Author(s):

Jue Wang ◽

Robert Maier ◽

Paul G. Dewa ◽

Horst Schreiber ◽

Robert A. Bellman ◽

...

Keyword(s):

Thin Film ◽

Spectroscopic Ellipsometry ◽

Nanoporous Structure ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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Optical Properties of GaN and Other III-Nitride Semiconductor Materials Studied by Variable Angle Spectroscopic Ellipsometry

10.21236/ada391193 ◽

2000 ◽

Author(s):

Huade W. Yao

Keyword(s):

Optical Properties ◽

Spectroscopic Ellipsometry ◽

Semiconductor Materials ◽

Variable Angle ◽

Nitride Semiconductor ◽

Variable Angle Spectroscopic Ellipsometry

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Characterization of silica xerogel films by variable-angle spectroscopic ellipsometry and infrared spectroscopy

Semiconductor Science and Technology ◽

10.1088/0268-1242/16/9/312 ◽

2001 ◽

Vol 16 (9) ◽

pp. 806-811 ◽

Author(s):

C Himcinschi ◽

M Friedrich ◽

C Murray ◽

I Streiter ◽

S E Schulz ◽

...

Keyword(s):

Infrared Spectroscopy ◽

Spectroscopic Ellipsometry ◽

Silica Xerogel ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry ◽

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The study of the optical properties of In/sub 0.52/(Al/sub x/Ga/sub 1-x/)/sub 0.48/As by variable angle spectroscopic ellipsometry

Seventh International Conference on Indium Phosphide and Related Materials ◽

10.1109/iciprm.1995.522125 ◽

2002 ◽

Author(s):

J.-W. Pan ◽

J.-L. Shieh ◽

J.-H. Gau ◽

J.-I. Chyi

Keyword(s):

Optical Properties ◽

Spectroscopic Ellipsometry ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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Precise measurement of ARC optical indices in the deep-UV range by variable-angle spectroscopic ellipsometry

10.1117/12.275961 ◽

1997 ◽

Author(s):

Pierre Boher ◽

Jean-Louis P. Stehle ◽

Jean-Philippe Piel ◽

Christophe Defranoux ◽

Louis Hennet

Keyword(s):

Spectroscopic Ellipsometry ◽

Precise Measurement ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry ◽

Deep Uv ◽

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Anisotropic dielectric response and surface aging of mercuric iodide crystal studied by variable angle spectroscopic ellipsometry

Thin Solid Films ◽

10.1016/s0040-6090(97)00845-6 ◽

1998 ◽

Vol 313-314 ◽

pp. 351-355 ◽

Author(s):

H. Yao ◽

Jay C. Erickson ◽

L.A. Lim ◽

Ralph B. James

Keyword(s):

Spectroscopic Ellipsometry ◽

Dielectric Response ◽

Mercuric Iodide ◽

Anisotropic Dielectric ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry ◽

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