scholarly journals Copper nitride thin films prepared by radio‐frequency reactive sputtering

1995 ◽  
Vol 78 (6) ◽  
pp. 4104-4107 ◽  
Author(s):  
Toshiro Maruyama ◽  
Tomonori Morishita
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Reactive Sputtering ◽  
Copper Nitride

Deposition of magnesium hydride thin films using radio frequency reactive sputtering

2011 ◽  
Vol 519 (18) ◽  
pp. 5949-5954 ◽  
Author(s):  
C. Platzer-Björkman ◽  
T. Mongstad ◽  
J.P. Mæhlen ◽  
A. Baldi ◽  
S. Karazhanov ◽  
...  
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Reactive Sputtering ◽  
Magnesium Hydride

scholarly journals Tin nitride thin films prepared by radio‐frequency reactive sputtering

1995 ◽  
Vol 77 (12) ◽  
pp. 6641-6645 ◽  
Author(s):  
Toshiro Maruyama ◽  
Tomonori Morishita
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Reactive Sputtering ◽  
Tin Nitride

Heteroepitaxial growth of CuInS2 thin films on sapphire by radio frequency reactive sputtering

2003 ◽  
Vol 83 (9) ◽  
pp. 1743-1745 ◽  
Author(s):  
Y. B. He ◽  
W. Kriegseis ◽  
B. K. Meyer ◽  
A. Polity ◽  
M. Serafin
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Reactive Sputtering ◽  
Heteroepitaxial Growth ◽  
Cuins2 Thin Films

scholarly journals Study on radio frequency reactive sputtering deposition of silicon nitride thin films

1992 ◽  
Vol 10 (3) ◽  
pp. 462-467 ◽  
Author(s):  
F. C. Stedile ◽  
I. J. R. Baumvol ◽  
W. H. Schreiner ◽  
F. L. Freire
Keyword(s):  
Thin Films ◽  
Silicon Nitride ◽  
Radio Frequency ◽  
Reactive Sputtering ◽  
Sputtering Deposition
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