Analysis of H atoms in a negative ion source plasma with the non-equilibrium electron energy distribution function

2012 ◽  
Vol 83 (2) ◽  
pp. 02A717
Author(s):  
S. Koga ◽  
T. Shibata ◽  
R. Terasaki ◽  
N. Kameyama ◽  
A. Hatayama ◽  
...  
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