Numerical study of ion energy and angular distributions in dual‐frequency capacitively coupled CF4 plasmas
2015 ◽
Vol 33
(3)
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pp. 031302
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2013 ◽
Vol 31
(6)
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pp. 061311
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2014 ◽
Vol 42
(10)
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pp. 2854-2855
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2008 ◽
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pp. 062004
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Keyword(s):
1994 ◽
Vol 141
(5)
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pp. 1313-1320
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Keyword(s):
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2006 ◽
Vol 75
(1)
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pp. 63-69
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