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Numerical investigation of ion energy and angular distributions in a dc-biased H2 inductively coupled discharge
Physics of Plasmas
◽
10.1063/5.0012770
◽
2020
◽
Vol 27
(9)
◽
pp. 093512
Author(s):
Sha-Sha Song
◽
Wei Liu
◽
Shuai Yin
◽
Yong-Xin Liu
◽
Fei Gao
◽
...
Keyword(s):
Numerical Investigation
◽
Angular Distributions
◽
Ion Energy
◽
Inductively Coupled
◽
Energy And Angular Distributions
Download Full-text
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References
Ion energy and angular distributions in planar Ar/O2 inductively coupled plasmas: hybrid simulation and experimental validation
Journal of Physics D Applied Physics
◽
10.1088/1361-6463/ab1dd3
◽
2019
◽
Vol 52
(29)
◽
pp. 295204
Author(s):
Yu-Ru Zhang
◽
Zhuan-Zhuan Zhao
◽
Chan Xue
◽
Fei Gao
◽
You-Nian Wang
Keyword(s):
Experimental Validation
◽
Hybrid Simulation
◽
Angular Distributions
◽
Inductively Coupled Plasmas
◽
Ion Energy
◽
Inductively Coupled
◽
Energy And Angular Distributions
◽
Coupled Plasmas
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Numerical investigation of RF pulsing effet on ion energy and angular distributions
2013 Abstracts IEEE International Conference on Plasma Science (ICOPS)
◽
10.1109/plasma.2013.6633364
◽
2013
◽
Author(s):
Deuk-Chul Kwon
◽
Mi-Young Song
◽
Jung-Sik Yoon
Keyword(s):
Numerical Investigation
◽
Angular Distributions
◽
Ion Energy
◽
Energy And Angular Distributions
Download Full-text
Two-dimensional simulation of ion energy and angular distributions at the wafer in RF biased inductively coupled chlorine plasmas
IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference (Cat. No.01CH37255)
◽
10.1109/ppps.2001.961275
◽
2002
◽
Author(s):
W.C. Lin
◽
Y. Hu
◽
T.L. Lin
Keyword(s):
Angular Distributions
◽
Two Dimensional
◽
Ion Energy
◽
Inductively Coupled
◽
Dimensional Simulation
◽
Energy And Angular Distributions
Download Full-text
Ion energy and angular distributions in inductively coupled radio frequency discharges in argon
Journal of Applied Physics
◽
10.1063/1.362977
◽
1996
◽
Vol 80
(3)
◽
pp. 1304-1311
◽
Cited By ~ 94
Author(s):
Joseph R. Woodworth
◽
Merle E. Riley
◽
Dorothy C. Meister
◽
Ben P. Aragon
◽
Minh S. Le
◽
...
Keyword(s):
Radio Frequency
◽
Angular Distributions
◽
Ion Energy
◽
Inductively Coupled
◽
Radio Frequency Discharges
◽
Energy And Angular Distributions
Download Full-text
Ion energy and angular distributions in inductively coupled Argon RF discharges
10.2172/212756
◽
1996
◽
Author(s):
J.R. Woodworth
◽
M.E. Riley
◽
D.C. Meister
Keyword(s):
Angular Distributions
◽
Ion Energy
◽
Inductively Coupled
◽
Rf Discharges
◽
Energy And Angular Distributions
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Control of ion energy and angular distributions using voltage waveform
IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th IEEE International Conference (Cat. No.99CH36297)
◽
10.1109/plasma.1999.829297
◽
2003
◽
Author(s):
S. Rauf
Keyword(s):
Angular Distributions
◽
Voltage Waveform
◽
Ion Energy
◽
Energy And Angular Distributions
Download Full-text
Control of ion energy and angular distributions in dual-frequency capacitively coupled plasmas through power ratios and phase: Consequences on etch profiles
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
◽
10.1116/1.4915248
◽
2015
◽
Vol 33
(3)
◽
pp. 031302
◽
Cited By ~ 19
Author(s):
Yiting Zhang
◽
Mark J. Kushner
◽
Saravanapriyan Sriraman
◽
Alexei Marakhtanov
◽
John Holland
◽
...
Keyword(s):
Angular Distributions
◽
Dual Frequency
◽
Ion Energy
◽
Capacitively Coupled
◽
Energy And Angular Distributions
◽
Coupled Plasmas
Download Full-text
Ion energy and angular distributions in inductively driven RF discharges in chlorine
10.2172/231654
◽
1996
◽
Author(s):
J.R. Woodworth
◽
M.E. Riley
◽
T.W. Hamilton
Keyword(s):
Angular Distributions
◽
Ion Energy
◽
Rf Discharges
◽
Energy And Angular Distributions
Download Full-text
Ion energy and angular distributions onto polymer surfaces delivered by dielectric barrier discharge filaments in air: II. Particles
Plasma Sources Science and Technology
◽
10.1088/0963-0252/20/3/035018
◽
2011
◽
Vol 20
(3)
◽
pp. 035018
◽
Cited By ~ 5
Author(s):
Natalia Yu Babaeva
◽
Mark J Kushner
Keyword(s):
Dielectric Barrier Discharge
◽
Barrier Discharge
◽
Polymer Surfaces
◽
Angular Distributions
◽
Dielectric Barrier
◽
Ion Energy
◽
Energy And Angular Distributions
Download Full-text
Calculation of the backscattered ion energy and angular distributions during the grazing implantation
Vacuum
◽
10.1016/0042-207x(95)80075-1
◽
1995
◽
Vol 46
(4)
◽
pp. 383-388
◽
Cited By ~ 2
Author(s):
IE Mozolevsky
Keyword(s):
Angular Distributions
◽
Ion Energy
◽
Energy And Angular Distributions
Download Full-text
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