Excess carrier generation in femtosecond-laser processed sulfur doped silicon by means of sub-bandgap illumination

2014 ◽  
Vol 104 (4) ◽  
pp. 042107 ◽  
Author(s):  
Kay-Michael Guenther ◽  
Thomas Gimpel ◽  
Jens W. Tomm ◽  
Stefan Winter ◽  
Augustinas Ruibys ◽  
...  
2017 ◽  
Vol 29 (6) ◽  
pp. 4526-4532 ◽  
Author(s):  
Yuanlin Shi ◽  
Zhiming Wu ◽  
Lingyan Du ◽  
Siyu Li ◽  
Yadong Jiang

2015 ◽  
Vol 15 (8) ◽  
pp. 4259-4263 ◽  
Author(s):  
Ji-Hong Zhao ◽  
Chun-Hao Li ◽  
Qi-Dai Chen ◽  
Hong-Bo Sun

1970 ◽  
Vol 13 (12) ◽  
pp. 1519-1526 ◽  
Author(s):  
J.L. Prince ◽  
J.J. Wortman ◽  
L.K. Monteith ◽  
J.R. Hauser

2004 ◽  
Vol 79 (7) ◽  
pp. 1635-1641 ◽  
Author(s):  
C.H. Crouch ◽  
J.E. Carey ◽  
M. Shen ◽  
E. Mazur ◽  
F.Y. Génin

1989 ◽  
Vol 158 ◽  
Author(s):  
T. Saveshimn ◽  
M. Hara ◽  
S. Usui

ABSTRACTTransient conductance measurements were used to study rapid carrier generation during the laser doping of a silicon film. The movement of the liquid-solid interface was measured and the point of initiation of carrier generation frcn dopant atoms diffused to the molten silicon was determined. It was established that the dopant atais are activated at the nmorent the dopant diffused region solidified. Also, the laser doping technique was used to fabricate polycrystalline silicsn thin film transistors (Poly-Si TFT's) ata processing temperature of 250ºC.


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