Nano particle porous alumina based thin film parallel plate capacitive humidity sensor

Mapping Intimacies ◽

10.1063/1.4872672 ◽

2014 ◽

Author(s):

Shailesh Kumar

Keyword(s):

Thin Film ◽

Parallel Plate ◽

Humidity Sensor ◽

Porous Alumina ◽

Nano Particle ◽

Capacitive Humidity Sensor

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A Thin Film Porous Alumina-Based Cross-Capacitive Humidity Sensor

IEEE Transactions on Instrumentation and Measurement ◽

10.1109/tim.2019.2921438 ◽

2020 ◽

Vol 69 (5) ◽

pp. 2269-2276 ◽

Author(s):

Zubair Hassan Zargar ◽

Tarikul Islam

Keyword(s):

Thin Film ◽

Humidity Sensor ◽

Porous Alumina ◽

Capacitive Humidity Sensor

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Effect of Polyethylene Glycol in Porous Alumina Based Thin Film Capacitive Humidity Sensor and Its Modelling

Transactions of the Indian Ceramic Society ◽

10.1080/0371750x.2013.793995 ◽

2013 ◽

Vol 72 (1) ◽

pp. 47-51 ◽

Author(s):

Tarikul Islam ◽

Lokesh Kumar ◽

Geetika Aswani

Keyword(s):

Thin Film ◽

Polyethylene Glycol ◽

Humidity Sensor ◽

Porous Alumina ◽

Capacitive Humidity Sensor

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Fabrication of Nanostructured Metal Oxide Thin Film Capacitive Humidity Sensor

Metal and Metal Oxides for Energy and Electronics - Environmental Chemistry for a Sustainable World ◽

10.1007/978-3-030-53065-5_10 ◽

2020 ◽

pp. 355-374

Author(s):

Anwar Ulla Khan ◽

Lokesh Kumar ◽

Tarikul Islam ◽

Mohammad Ehtisham Khan

Keyword(s):

Thin Film ◽

Metal Oxide ◽

Humidity Sensor ◽

Oxide Thin Film ◽

Metal Oxide Thin Film ◽

Nanostructured Metal ◽

Capacitive Humidity Sensor

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Electrode Structure and Heat Treatment Effects on Stabilization of Capacitive Humidity Sensor with Plasma-Polymerized Thin Film

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.909 ◽

1999 ◽

Vol 38 (Part 1, No. 2A) ◽

pp. 909-912 ◽

Author(s):

Shin-ichi Takeda

Keyword(s):

Thin Film ◽

Heat Treatment ◽

Humidity Sensor ◽

Treatment Effects ◽

Electrode Structure ◽

Capacitive Humidity Sensor

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Humidity sensor structures with thin film porous alumina for on-chip integration

Thin Solid Films ◽

10.1016/j.tsf.2009.04.010 ◽

2009 ◽

Vol 517 (22) ◽

pp. 6198-6201 ◽

Author(s):

L. Juhász ◽

J. Mizsei

Keyword(s):

Thin Film ◽

Humidity Sensor ◽

Porous Alumina ◽

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Capacitive humidity sensor with controlled performances, based on porous Al2O3 thin film growm on SiO2-Si substrate

Sensors and Actuators B Chemical ◽

10.1016/0925-4005(93)01082-f ◽

1994 ◽

Vol 19 (1-3) ◽

pp. 551-553 ◽

Author(s):

G. Sberveglieri ◽

G. Rinchetti ◽

S. Groppelli ◽

G. Faglia

Keyword(s):

Thin Film ◽

Humidity Sensor ◽

Si Substrate ◽

Capacitive Humidity Sensor ◽

Al2o3 Thin Film

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Capacitive humidity sensor with a coplanar electrode structure based on anodised porous alumina film

Micro & Nano Letters ◽

10.1049/mnl.2012.0666 ◽

2012 ◽

Vol 7 (11) ◽

pp. 1097-1100 ◽

Author(s):

Jiawei Li ◽

Xinhua Lin ◽

Jie Li ◽

Ying Liu ◽

Min Tang

Keyword(s):

Humidity Sensor ◽

Porous Alumina ◽

Alumina Film ◽

Electrode Structure ◽

Capacitive Humidity Sensor

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Integrated vertical parallel-plate capacitive humidity sensor

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/21/6/065028 ◽

2011 ◽

Vol 21 (6) ◽

pp. 065028 ◽

Author(s):

N Lazarus ◽

G K Fedder

Keyword(s):

Parallel Plate ◽

Humidity Sensor ◽

Capacitive Humidity Sensor

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Fabrication & Modeling of Thin Film Capacitive Humidity Sensor Using ANN

2020 2nd International Conference on Advances in Computing, Communication Control and Networking (ICACCCN) ◽

10.1109/icacccn51052.2020.9362819 ◽

2020 ◽

Author(s):

Geetika Aswani

Keyword(s):

Thin Film ◽

Humidity Sensor ◽

Capacitive Humidity Sensor

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A simple humidity sensor with thin film porous alumina and integrated heating

Procedia Engineering ◽

10.1016/j.proeng.2010.09.206 ◽

2010 ◽

Vol 5 ◽

pp. 701-704 ◽

Author(s):

László Juhász ◽

János Mizsei

Keyword(s):

Thin Film ◽

Humidity Sensor ◽

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