The pressure dependence of the discharge properties in a capacitively coupled oxygen discharge

2015 ◽  
Vol 118 (15) ◽  
pp. 153302 ◽  
Author(s):  
J. T. Gudmundsson ◽  
Bruno Ventéjou
Keyword(s):  
Pressure Dependence ◽  
Capacitively Coupled ◽  
Oxygen Discharge

scholarly journals The Influence of Secondary Electron Emission and Electron Reflection on a Capacitively Coupled Oxygen Discharge

Atoms ◽  
2018 ◽  
Vol 6 (4) ◽  
pp. 65 ◽  
Author(s):  
Andrea Proto ◽  
Jon Gudmundsson
Keyword(s):  
Electron Density ◽  
Electron Energy ◽  
Electron Emission ◽  
Secondary Electron ◽  
Probability Function ◽  
Secondary Electron Emission ◽  
Capacitively Coupled ◽  
Electron Reflection ◽  
Oxygen Discharge ◽  
Plasma Bulk

The one-dimensional object-oriented particle-in-cell Monte Carlo collision code oopd1 is applied to explore the role of secondary electron emission and electron reflection on the properties of the capacitively-coupled oxygen discharge. At low pressure (10 mTorr), drift-ambipolar heating of the electrons dominates within the plasma bulk, while at higher pressure (50 mTorr), stochastic electron heating in the sheath region dominates. Electron reflection has negligible influence on the electron energy probability function and only a slight influence on the electron heating profile and electron density. Including ion-induced secondary electron emission in the discharge model introduces a high energy tail to the electron energy probability function, enhances the electron density, lowers the electronegativity, and increases the effective electron temperature in the plasma bulk.

Experimental and simulation study of a capacitively coupled oxygen discharge driven by tailored voltage waveforms

2015 ◽  
Vol 25 (1) ◽  
pp. 015004 ◽  
Author(s):  
Aranka Derzsi ◽  
Trevor Lafleur ◽  
Jean-Paul Booth ◽  
Ihor Korolov ◽  
Zoltán Donkó
Keyword(s):  
Simulation Study ◽  
Capacitively Coupled ◽  
Oxygen Discharge

On the pressure dependence of the thermodynamical scaling exponent γ

Soft Matter ◽  
2020 ◽  
Vol 16 (19) ◽  
pp. 4625-4631 ◽  
Author(s):  
R. Casalini ◽  
T. C. Ransom
Keyword(s):  
Pressure Dependence ◽  
Scaling Exponent ◽  
Scaling Parameter

In materials with a constant scaling parameter γS, the Isomorph γI is found to vary with pressure, demonstrating γS ≠ γI.

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