Investigation of static and dynamic behavior of functionally graded piezoelectric actuated Poly-Si micro cantilever probe
2007 ◽
Vol 65
(1)
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pp. 155-162
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2016 ◽
2007 ◽
Vol 28
(5)
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pp. 615-625
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Keyword(s):
2007 ◽
Vol 78
(6)
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pp. 443-464
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2005 ◽
Vol 42
(11-12)
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pp. 3133-3146
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