In situ Absorbance Spectroscopy for Characterizing the Low Temperature Oxidation Kinetics of Sputtered Copper Films

2014 ◽  
Vol 83 (1-2) ◽  
pp. 89-99 ◽  
Author(s):  
Katherine P. Rice ◽  
Junsu Han ◽  
Ian P. Campbell ◽  
Mark P. Stoykovich
Author(s):  
Ronald R. Glaser ◽  
John F. Schabron ◽  
Thomas F. Turner ◽  
Jean-Pascal Planche ◽  
Stephen L. Salmans ◽  
...  

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