Development of digitally processed DC reactive sputtering and its application to the synthesis of (Er0.1Y0.9)2SiO5 layered crystalline thin film
2020 ◽
Vol 140
(12)
◽
pp. 369-373
2018 ◽
Vol 18
(11)
◽
pp. 7670-7681
2013 ◽
Vol 52
(11S)
◽
pp. 11NB09
◽
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