Transparency Improvement of SiCO Thin Film for Optical Waveguide with Reactive Sputtering Method
2020 ◽
Vol 140
(12)
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pp. 369-373
2018 ◽
Vol 18
(11)
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pp. 7670-7681
2013 ◽
Vol 52
(11S)
◽
pp. 11NB09
◽
2001 ◽
Vol 117
(1-3)
◽
pp. 131-133
◽
2018 ◽
Vol 53
(15)
◽
pp. 10822-10834
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Keyword(s):
2011 ◽
Keyword(s):