Single-frequency tunable XeCl* excimer laser

1990 ◽  
Vol 20 (5) ◽  
pp. 465-466
Author(s):  
M S Dzhidzhoev ◽  
S V Krayushkin ◽  
Viktor T Platonenko
Keyword(s):  
Excimer Laser ◽  
Single Frequency ◽  
Frequency Tunable ◽  
Xecl Excimer Laser

Poly-Silicon TFT Annealing with XeCl Excimer Laser.

2000 ◽  
Vol 28 (1) ◽  
pp. 24-28 ◽  
Author(s):  
Junichi SHIDA ◽  
Naoyuki KOBAYASHI ◽  
Hideaki KUSAMA
Keyword(s):  
Excimer Laser ◽  
Poly Silicon ◽  
Xecl Excimer Laser

Control of SF6 discharge gap switch by XeCl excimer laser

1991 ◽  
Vol 111 (4) ◽  
pp. 46-51 ◽  
Author(s):  
Hisato Okuda ◽  
Kazuhisa Katayama ◽  
Xiaojun Wang ◽  
Katsumi Masugata ◽  
Kiyoshi Yatsui
Keyword(s):  
Excimer Laser ◽  
Sf6 Discharge ◽  
Discharge Gap ◽  
Xecl Excimer Laser

5 kHz high repetition rate and high power XeCl excimer laser

1995 ◽  
Vol 66 (11) ◽  
pp. 5162-5164 ◽  
Author(s):  
Tatsumi Goto ◽  
Koji Kakizaki ◽  
Shigeyuki Takagi ◽  
Noboru Okamoto ◽  
Saburo Sato ◽  
...  
Keyword(s):  
Excimer Laser ◽  
High Power ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Xecl Excimer Laser

In-vitro ablation of fibrocartilage by XeCl excimer laser

1991 ◽  
Author(s):  
Martin Buchelt ◽  
Thanassis Papaioannou ◽  
Michael C. Fishbein ◽  
Werner Peters ◽  
Clain Beeder ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Xecl Excimer Laser

Formation and control of phosphorus buried layers in silicon using a pulsed XeCl excimer laser

1996 ◽  
Vol 69 (3) ◽  
pp. 319-321
Author(s):  
G. Verma ◽  
S. Talwar ◽  
T. W. Sigmon
Keyword(s):  
Excimer Laser ◽  
Buried Layers ◽  
And Control ◽  
Xecl Excimer Laser
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