Semiconductor wafer fabrication production planning using multi-fidelity simulation optimisation

International Journal of Production Research ◽

10.1080/00207543.2019.1683252 ◽

2020 ◽

Vol 58 (21) ◽

pp. 6585-6600

Author(s):

Fan Zhang ◽

Jie Song ◽

Yingzhuo Dai ◽

Jie Xu

Keyword(s):

Production Planning ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Simulation Optimisation ◽

Semiconductor Wafer Fabrication

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Simulation-based performance assessment of production planning formulations for semiconductor wafer fabrication

2015 Winter Simulation Conference (WSC) ◽

10.1109/wsc.2015.7408392 ◽

2015 ◽

Author(s):

Timm Ziarnetzky ◽

N. Baris Kacar ◽

Lars Monch ◽

Reha Uzsoy

Keyword(s):

Performance Assessment ◽

Production Planning ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Simulation Based ◽

Semiconductor Wafer Fabrication

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A Practical Production Planning Method in a Semiconductor Wafer Fabrication

IFAC Proceedings Volumes ◽

10.1016/s1474-6670(17)42270-1 ◽

1997 ◽

Vol 30 (19) ◽

pp. 25-30

Author(s):

Y.S. Chang ◽

C.B. Besant ◽

C.K.G. Tjiang

Keyword(s):

Production Planning ◽

Planning Method ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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Production Planning and Control for Semiconductor Wafer Fabrication Facilities

10.1007/978-1-4614-4472-5 ◽

2013 ◽

Author(s):

Lars Mönch ◽

John W. Fowler ◽

Scott J. Mason

Keyword(s):

Production Planning ◽

Wafer Fabrication ◽

Production Planning And Control ◽

Semiconductor Wafer ◽

Planning And Control ◽

Semiconductor Wafer Fabrication ◽

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Simulation-Based Performance Assessment of Production Planning Models With Safety Stock and Forecast Evolution in Semiconductor Wafer Fabrication

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2019.2958526 ◽

2020 ◽

Vol 33 (1) ◽

pp. 1-12

Author(s):

Timm Ziarnetzky ◽

Lars Monch ◽

Reha Uzsoy

Keyword(s):

Performance Assessment ◽

Production Planning ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Safety Stock ◽

Planning Models ◽

Simulation Based ◽

Semiconductor Wafer Fabrication

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Cycle time-oriented mid-term production planning for semiconductor wafer fabrication

International Journal of Production Research ◽

10.1080/00207543.2016.1278083 ◽

2017 ◽

Vol 55 (16) ◽

pp. 4662-4679 ◽

Author(s):

Phillip O. Kriett ◽

Sebastian Eirich ◽

Martin Grunow

Keyword(s):

Production Planning ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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Finite-capacity production planning algorithms for a semiconductor wafer fabrication facility

International Journal of Production Research ◽

10.1080/00207540010010253 ◽

2001 ◽

Vol 39 (5) ◽

pp. 825-842 ◽

Author(s):

K. Horiguchi ◽

N. Raghavan ◽

R Uzsoy ◽

S. Venkateswaran

Keyword(s):

Production Planning ◽

Wafer Fabrication ◽

Finite Capacity ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication ◽

Planning Algorithms

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Tractable Nonlinear Production Planning Models for Semiconductor Wafer Fabrication Facilities

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2005.863214 ◽

2006 ◽

Vol 19 (1) ◽

pp. 95-111 ◽

Author(s):

J. Asmundsson ◽

R.L. Rardin ◽

R. Uzsoy

Keyword(s):

Production Planning ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Planning Models ◽

Semiconductor Wafer Fabrication

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Hierarchical Production Planning for Semiconductor Wafer Fabrication Based on Linear Programming and Discrete-Event Simulation

IEEE Transactions on Automation Science and Engineering ◽

10.1109/tase.2009.2021462 ◽

2010 ◽

Vol 7 (2) ◽

pp. 326-336 ◽

Author(s):

June-Young Bang ◽

Yeong-Dae Kim

Keyword(s):

Linear Programming ◽

Production Planning ◽

Discrete Event Simulation ◽

Discrete Event ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Event Simulation ◽

Hierarchical Production Planning ◽

Semiconductor Wafer Fabrication

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A performance model of automated material handling systems with double closed-loops and shortcuts in 300 mm semiconductor wafer fabrication systems

Journal of Manufacturing Systems ◽

10.1016/j.jmsy.2020.12.006 ◽

2021 ◽

Vol 58 ◽

pp. 316-334

Author(s):

Lihui Wu ◽

Zhongwei Zhang ◽

Jie Zhang ◽

Ray Y. Zhong ◽

Junliang Wang

Keyword(s):

Material Handling ◽

Performance Model ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Closed Loops ◽

Material Handling Systems ◽

Semiconductor Wafer Fabrication ◽

Automated Material Handling ◽

Automated Material Handling Systems ◽

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Scheduling semiconductor wafer fabrication

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/66.4384 ◽

1988 ◽

Vol 1 (3) ◽

pp. 115-130 ◽

Author(s):

L.M. Wein

Keyword(s):

Wafer Fabrication ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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