Ultra-thin film encapsulation processes for micro-electro-mechanical devices and systems
2006 ◽
Vol 39
(9)
◽
pp. R163-R170
◽
2004 ◽
Vol 5
(3)
◽
pp. 30-34
◽
2008 ◽
Vol 39
(1)
◽
pp. 2011
◽
2020 ◽
Vol 140
(4)
◽
pp. 92-96
2007 ◽
Vol 33
(13)
◽
pp. 1083-1091
◽
Keyword(s):
2009 ◽
Vol 24
(9)
◽
pp. 2935-2938
◽
Keyword(s):