Micro-Raman spectroscopic study of two-dimensional stress distribution in poly-Si induced by patterns

1998 ◽  
Vol 13 (6) ◽  
pp. 634-636 ◽  
Author(s):  
B-B Li ◽  
F Huang ◽  
S-L Zhang ◽  
Y Gao ◽  
L Zhang
2021 ◽  
Vol 118 (13) ◽  
pp. 133101
Author(s):  
Sanghyun Kim ◽  
Donghyeon Lee ◽  
Binbin Wang ◽  
Shang-Jie Yu ◽  
Kenji Watanabe ◽  
...  

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