Parallel-local anodic oxidation of silicon surfaces by soft stamps
Keyword(s):
2019 ◽
Vol 1410
◽
pp. 012233
◽
Keyword(s):
2018 ◽
Vol 1124
◽
pp. 041024
2011 ◽
Vol 50
◽
pp. 035202
◽
2000 ◽
Vol 40
(4-5)
◽
pp. 815-819
◽
Keyword(s):
2018 ◽
Vol 13
(1-2)
◽
pp. 84-89
◽