Pre-distorted sinewave-driven parallel-plate electrostatic actuator for harmonic displacement

2005 ◽  
Vol 15 (7) ◽  
pp. S103-S108 ◽  
Author(s):  
G de Graaf ◽  
L Mol ◽  
L A Rocha ◽  
E Cretu ◽  
R F Wolffenbuttel
Keyword(s):  
Parallel Plate ◽  
Electrostatic Actuator ◽  
Harmonic Displacement

scholarly journals Dynamics of a parallel-plate electrostatic actuator in viscous dielectric media

2019 ◽  
Vol 295 ◽  
pp. 366-373 ◽  
Author(s):  
Sindhu Preetham Burugupally ◽  
W. Roshantha Perera
Keyword(s):  
Parallel Plate ◽  
Electrostatic Actuator ◽  
Dielectric Media

Low Voltage Electrostatic Actuation for MEMS Actuator Using Frequency Modulation

2013 ◽  
Author(s):  
Sangtak Park ◽  
Mahmoud Khater ◽  
Eihab Abdel-Rahman
Keyword(s):  
Fixed Points ◽  
Quality Factor ◽  
Analytical Model ◽  
Frequency Modulation ◽  
Input Signal ◽  
Parallel Plate ◽  
Low Voltage ◽  
Electrostatic Actuator ◽  
Drive Circuit ◽  
The Stability

In this paper, we derive and present an analytical model of the parallel-plate electrostatic actuator coupled with the resonant drive circuit when it is driven by a frequency-modulated input signal. Using this analytical model, we determine the stability of the fixed points of the actuator without linearization process. Furthermore, we study the effect of parasitic capacitance and the quality factor of the resonant drive circuit on the operation range and stability of the electrostatic actuator.

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