Fabrication of Si microstructures using focused ion beam implantation and reactive ion etching

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/18/3/035003 ◽

2008 ◽

Vol 18 (3) ◽

pp. 035003 ◽

Author(s):

H X Qian ◽

Wei Zhou ◽

Jianmin Miao ◽

Lennie E N Lim ◽

X R Zeng

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Reactive Ion Etching ◽

Ion Etching ◽

Ion Beam Implantation

Download Full-text

Dry lithography using focused ion beam implantation and reactive ion etching of SiO2

Applied Physics Letters ◽

10.1063/1.109623 ◽

1993 ◽

Vol 62 (25) ◽

pp. 3294-3296 ◽

Author(s):

Kent D. Choquette ◽

Lloyd R. Harriott

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Reactive Ion Etching ◽

Ion Etching ◽

Ion Beam Implantation

Download Full-text

Fabrication of Nanochannels with High Aspect Ratios on a Silicon Substrate by Local Focused Ion Beam Implantation and Deep Reactive Ion Etching

Japanese Journal of Applied Physics ◽

10.1143/jjap.49.06gk04 ◽

2010 ◽

Vol 49 (6) ◽

pp. 06GK04 ◽

Author(s):

Jin Han ◽

Tae-Gon Kim ◽

Byung-Kwon Min ◽

Sang Jo Lee

Keyword(s):

Silicon Substrate ◽

Focused Ion Beam ◽

Ion Beam ◽

Reactive Ion Etching ◽

Ion Etching ◽

Deep Reactive Ion Etching ◽

Aspect Ratios ◽

Ion Beam Implantation

Download Full-text

Freestanding optical micro-disk resonators in single-crystal diamond by reactive ion etching and multidirectional focused ion-beam milling

Advances in Photonics of Quantum Computing, Memory, and Communication XI ◽

10.1117/12.2290177 ◽

2018 ◽

Author(s):

Teodoro Graziosi ◽

Sichen Mi ◽

Niels Quack ◽

Marcell Kiss

Keyword(s):

Single Crystal ◽

Focused Ion Beam ◽

Ion Beam ◽

Reactive Ion Etching ◽

Ion Etching ◽

Disk Resonators ◽

Single Crystal Diamond ◽

Focused Ion Beam Milling

Download Full-text

Deep reactive ion etching and focused ion beam combination for nanotip fabrication

Materials Science and Engineering C ◽

10.1016/j.msec.2006.01.002 ◽

2006 ◽

Vol 26 (2-3) ◽

pp. 164-168 ◽

Author(s):

G. Villanueva ◽

J.A. Plaza ◽

A. Sánchez-Amores ◽

J. Bausells ◽

E. Martínez ◽

...

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Reactive Ion Etching ◽

Ion Etching ◽

Deep Reactive Ion Etching ◽

Beam Combination

Download Full-text

Sharp High-Aspect-Ratio AFM Tips Fabricated by a Combination of Deep Reactive Ion Etching and Focused Ion Beam Techniques

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2010.1737 ◽

2010 ◽

Vol 10 (1) ◽

pp. 497-501 ◽

Author(s):

David Caballero ◽

Guillermo Villanueva ◽

Jose Antonio Plaza ◽

Christopher A. Mills ◽

Josep Samitier ◽

...

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Focused Ion Beam ◽

Ion Beam ◽

Reactive Ion Etching ◽

Ion Etching ◽

Deep Reactive Ion Etching ◽

Download Full-text

Submicrometer transmission mask fabricated by low-temperature SF[sub 6]/O[sub 2] reactive ion etching and focused ion beam

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.590330 ◽

1998 ◽

Vol 16 (6) ◽

pp. 2982 ◽

Author(s):

H. Y. Sheng

Keyword(s):

Low Temperature ◽

Focused Ion Beam ◽

Ion Beam ◽

Reactive Ion Etching ◽

Download Full-text

Ga[sup +] focused-ion-beam exposure and CF[sub 4] reactive-ion-etching development of Si[sub 3]N[sub 4] resist optimized by Monte Carlo simulation

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.590086 ◽

1998 ◽

Vol 16 (3) ◽

pp. 1161 ◽

Author(s):

Hyun-Yong Lee

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Focused Ion Beam ◽

Ion Beam ◽

Reactive Ion Etching ◽

Download Full-text

Dry fabrication of microdevices by the combination of focused ion beam and cryogenic deep reactive ion etching

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/20/8/085009 ◽

2010 ◽

Vol 20 (8) ◽

pp. 085009 ◽

Author(s):

N Chekurov ◽

K Grigoras ◽

L Sainiemi ◽

A Peltonen ◽

I Tittonen ◽

...

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Reactive Ion Etching ◽

Ion Etching ◽

Deep Reactive Ion Etching

Download Full-text

Fabrication of Molds with 25-nm Dot-Pitch Pattern by Focused Ion Beam and Reactive Ion Etching for Nanoimprint Using Metallic Glass

Japanese Journal of Applied Physics ◽

10.7567/jjap.51.086702 ◽

2012 ◽

Vol 51 (8R) ◽

pp. 086702 ◽

Author(s):

Yasuyuki Fukuda ◽

Yasunori Saotome ◽

Nobuyuki Nishiyama ◽

Noriko Saidoh ◽

Eiichi Makabe ◽

...

Keyword(s):

Metallic Glass ◽

Focused Ion Beam ◽

Ion Beam ◽

Reactive Ion Etching ◽

Ion Etching ◽

Download Full-text

Fabrication of Molds with 25-nm Dot-Pitch Pattern by Focused Ion Beam and Reactive Ion Etching for Nanoimprint Using Metallic Glass

Japanese Journal of Applied Physics ◽

10.1143/jjap.51.086702 ◽

2012 ◽

Vol 51 ◽

pp. 086702 ◽

Author(s):

Yasuyuki Fukuda ◽

Yasunori Saotome ◽

Nobuyuki Nishiyama ◽

Noriko Saidoh ◽

Eiichi Makabe ◽

...

Keyword(s):

Metallic Glass ◽

Focused Ion Beam ◽

Ion Beam ◽

Reactive Ion Etching ◽

Ion Etching ◽

Download Full-text