Monolithic integration of capacitive sensors using a double-side CMOS MEMS post process

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/19/1/015023 ◽

2008 ◽

Vol 19 (1) ◽

pp. 015023 ◽

Author(s):

Chih-Ming Sun ◽

Chuanwei Wang ◽

Ming-Han Tsai ◽

Hsieh-Shen Hsieh ◽

Weileun Fang

Keyword(s):

Monolithic Integration ◽

Capacitive Sensors ◽

Post Process ◽

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Design and application of a metal wet-etching post-process for the improvement of CMOS-MEMS capacitive sensors

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/19/10/105017 ◽

2009 ◽

Vol 19 (10) ◽

pp. 105017 ◽

Author(s):

Ming-Han Tsai ◽

Chih-Ming Sun ◽

Yu-Chia Liu ◽

Chuanwei Wang ◽

Weileun Fang

Keyword(s):

Wet Etching ◽

Capacitive Sensors ◽

Post Process ◽

Cmos Mems ◽

Design And Application

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Monolithic Integration of Plasmonic Meta-Material Absorber with CMOS-MEMs Infrared Sensor for Responsivity Enhancement and Human Detection Application

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/mems46641.2020.9056382 ◽

2020 ◽

Author(s):

Pen-Sheng Lin ◽

Ting-Wei Shen ◽

Kai-Chieh Chang ◽

Weileun Fang

Keyword(s):

Monolithic Integration ◽

Human Detection ◽

Infrared Sensor ◽

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CMOS-MEMS capacitive sensors for intra-cranial pressure monitoring: Sensor fabrication & system design

2012 International SoC Design Conference (ISOCC) ◽

10.1109/isocc.2012.6407119 ◽

2012 ◽

Author(s):

Arup K George ◽

Wai Pan Chan ◽

Margarita Sofia Narducci ◽

Zhi Hui Kong ◽

Minkyu Je

Keyword(s):

System Design ◽

Capacitive Sensors ◽

Pressure Monitoring ◽

Sensor Fabrication ◽

Cmos Mems ◽

Intra Cranial Pressure

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Study on compatible CMOS-MEMS process with surface micromachining for the application of monolithic integration

The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) ◽

10.1109/nems.2014.6908861 ◽

2014 ◽

Author(s):

Danqi Zhao ◽

Xian Huang ◽

Jun He ◽

Li Zhang ◽

Peng Liu ◽

...

Keyword(s):

Monolithic Integration ◽

Surface Micromachining ◽

Cmos Mems ◽

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Monolithic Integration of Digital MEMS Thermometer and temperature compensated RTC on 1P6M ASIC compatible CMOS MEMS process

2018 IEEE International Conference on Semiconductor Electronics (ICSE) ◽

10.1109/smelec.2018.8481316 ◽

2018 ◽

Author(s):

Ching-Wen Hsu ◽

Kuei-Ann Wen

Keyword(s):

Monolithic Integration ◽

Cmos Mems ◽

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A Wet Etching Post-process for CMOS-MEMS RF Switches

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems ◽

10.1109/nems.2007.352179 ◽

2007 ◽

Author(s):

Ching-Liang Dai ◽

Mao-Chen Liu

Keyword(s):

Wet Etching ◽

Rf Switches ◽

Post Process ◽

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Design and post-process of an integrated CMOS-MEMS IR emitter with an embedded detector

2018 SBFoton International Optics and Photonics Conference (SBFoton IOPC) ◽

10.1109/sbfoton-iopc.2018.8610948 ◽

2018 ◽

Author(s):

Vanessa J. Gamero ◽

Pedro H. A. Amorim ◽

Julian H. Sierra ◽

Gustavo P. Rehder ◽

Marco I. Alayo

Keyword(s):

Post Process ◽

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Monolithic Integration of Pressure/Humidity/Temperature Sensors for CMOS-Mems Environmental Sensing Hub with Structure Designs for Performances Enhancement

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/mems46641.2020.9056401 ◽

2020 ◽

Author(s):

Yung-Chian Lin ◽

Ping-Hsiu Hong ◽

Sheng-Kai Yeh ◽

Cheng-Chun Chang ◽

Weileun Fang

Keyword(s):

Temperature Sensors ◽

Monolithic Integration ◽

Environmental Sensing ◽

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Monolithic integration of mutually injection-locked CMOS-MEMS oscillators for differential resonant sensing applications

2016 IEEE International Conference on Electronics, Circuits and Systems (ICECS) ◽

10.1109/icecs.2016.7841312 ◽

2016 ◽

Author(s):

P. Prache ◽

P. M. Ferreira ◽

N. Barniol ◽

J. Juillard

Keyword(s):

Monolithic Integration ◽

Sensing Applications ◽

Mems Oscillators ◽

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A new process for thermally stable CMOS MEMS capacitive sensors

2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems ◽

10.1109/nems.2011.6017360 ◽

2011 ◽

Author(s):

S. S. Tan ◽

C. Y. Liu ◽

L. K. Yeh ◽

Y. H. Chiu ◽

Klaus Y. J. Hsu

Keyword(s):

Capacitive Sensors ◽

Thermally Stable ◽

New Process ◽

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