Designing a robust high-speed CMOS-MEMS capacitive humidity sensor

2012 ◽  
Vol 22 (8) ◽  
pp. 085021 ◽  
Author(s):  
N Lazarus ◽  
G K Fedder
Keyword(s):  
High Speed ◽  
Humidity Sensor ◽  
Cmos Mems ◽  
Capacitive Humidity Sensor

Development of a CMOS-MEMS RF-aerogel-based capacitive humidity sensor

2014 ◽  
Author(s):  
Vincent P. J. Chung ◽  
Jack K.-C. Liang ◽  
Chao-Lin Cheng ◽  
Ming-Chuen Yip ◽  
Weileun Fang
Keyword(s):  
Humidity Sensor ◽  
Cmos Mems ◽  
Capacitive Humidity Sensor

Resorcinol–formaldehyde aerogels for CMOS-MEMS capacitive humidity sensor

2015 ◽  
Vol 214 ◽  
pp. 181-188 ◽  
Author(s):  
Vincent P.J. Chung ◽  
Ming-Chuen Yip ◽  
Weileun Fang
Keyword(s):  
Humidity Sensor ◽  
Resorcinol Formaldehyde ◽  
Cmos Mems ◽  
Capacitive Humidity Sensor

CMOS-MEMS Capacitive Humidity Sensor

2010 ◽  
Vol 19 (1) ◽  
pp. 183-191 ◽  
Author(s):  
Nathan Lazarus ◽  
Sarah S. Bedair ◽  
Chiung-C. Lo ◽  
Gary K. Fedder
Keyword(s):  
Humidity Sensor ◽  
Cmos Mems ◽  
Capacitive Humidity Sensor
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