Optical diagnostics for characterization of electron energy distributions: argon inductively coupled plasmas

Plasma Sources Science and Technology ◽

10.1088/0963-0252/20/5/055006 ◽

2011 ◽

Vol 20 (5) ◽

pp. 055006 ◽

Author(s):

John B Boffard ◽

R O Jung ◽

Chun C Lin ◽

L E Aneskavich ◽

A E Wendt

Keyword(s):

Electron Energy ◽

Optical Diagnostics ◽

Inductively Coupled Plasmas ◽

Energy Distributions ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Control of electron energy distributions in inductively coupled plasmas using tandem sources

2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) ◽

10.1109/plasma.2013.6634887 ◽

2013 ◽

Author(s):

Michael D. Logue ◽

Mark J. Kushner ◽

Weiye Zhu ◽

Hyungjoo Shin ◽

Lei Liu ◽

...

Keyword(s):

Electron Energy ◽

Inductively Coupled Plasmas ◽

Energy Distributions ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Comparison of pressure dependence of electron energy distributions in oxygen capacitively and inductively coupled plasmas

Physical Review E ◽

10.1103/physreve.81.046402 ◽

2010 ◽

Vol 81 (4) ◽

Author(s):

Min-Hyong Lee ◽

Hyo-Chang Lee ◽

Chin-Wook Chung

Keyword(s):

Electron Energy ◽

Pressure Dependence ◽

Inductively Coupled Plasmas ◽

Energy Distributions ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Angular anisotropy of electron energy distributions in inductively coupled plasmas

Journal of Applied Physics ◽

10.1063/1.1614428 ◽

2003 ◽

Vol 94 (9) ◽

pp. 5522-5529 ◽

Author(s):

Alex V. Vasenkov ◽

Mark J. Kushner

Keyword(s):

Electron Energy ◽

Inductively Coupled Plasmas ◽

Angular Anisotropy ◽

Energy Distributions ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Electron energy distributions and electron impact source functions in Ar/N2 inductively coupled plasmas using pulsed power

Journal of Applied Physics ◽

10.1063/1.4904935 ◽

2015 ◽

Vol 117 (4) ◽

pp. 043301 ◽

Author(s):

Michael D. Logue ◽

Mark J. Kushner

Keyword(s):

Electron Impact ◽

Electron Energy ◽

Pulsed Power ◽

Inductively Coupled Plasmas ◽

Energy Distributions ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Optical emission measurements of electron energy distributions in low-pressure argon inductively coupled plasmas

Plasma Sources Science and Technology ◽

10.1088/0963-0252/19/6/065001 ◽

2010 ◽

Vol 19 (6) ◽

pp. 065001 ◽

Author(s):

John B Boffard ◽

R O Jung ◽

Chun C Lin ◽

A E Wendt

Keyword(s):

Electron Energy ◽

Optical Emission ◽

Low Pressure ◽

Inductively Coupled Plasmas ◽

Energy Distributions ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Mechanisms for electron energy transport and electron energy distributions in magnetically enhanced inductively coupled plasmas

IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference (Cat. No.01CH37255) ◽

10.1109/ppps.2001.961237 ◽

2002 ◽

Author(s):

R.L. Kinder ◽

M.J. Kushner

Keyword(s):

Electron Energy ◽

Energy Transport ◽

Inductively Coupled Plasmas ◽

Energy Distributions ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Influence of electron-electron collisions on electron energy distributions and transport in inductively coupled plasmas

IEEE Conference Record - Abstracts 2002 IEEE International Conference on Plasma Science (Cat No 02CH37340) PLASMA-02 ◽

10.1109/plasma.2002.1030237 ◽

2003 ◽

Author(s):

A. Vasenkov ◽

M.J. Kushner

Keyword(s):

Electron Energy ◽

Inductively Coupled Plasmas ◽

Energy Distributions ◽

Electron Collisions ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Optical Characterization of RF Inductively Coupled Plasmas

Electron Kinetics and Applications of Glow Discharges - NATO Science Series: B ◽

10.1007/0-306-47076-4_29 ◽

2006 ◽

pp. 489-502 ◽

Author(s):

A. E. Wendt ◽

D. F. Beale ◽

W. N. G. Hitchon ◽

E. Keiter ◽

V. Kolobov ◽

...

Keyword(s):

Optical Characterization ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Modeling argon inductively coupled plasmas: The electron energy distribution function and metastable kinetics

Journal of Applied Physics ◽

10.1063/1.1452772 ◽

2002 ◽

Vol 91 (6) ◽

pp. 3539-3546 ◽

Author(s):

Mark W. Kiehlbauch ◽

David B. Graves

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Lorentz force effect on electron energy distribution in low pressure inductively coupled plasmas

IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference (Cat. No.01CH37255) ◽

10.1109/ppps.2001.961052 ◽

2002 ◽

Author(s):

V.I. Kolobov ◽

V.A. Godyak

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Lorentz Force ◽

Low Pressure ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Force Effect ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text