Design, fabrication and characterization of RF MEMS shunt switch for wideband operation of 3 GHz to 30 GHz

2019 ◽  
Vol 29 (11) ◽  
pp. 115009
Author(s):  
Anurag Swarnkar ◽  
Amitava DasGupta ◽  
Deleep R Nair
Keyword(s):  
Rf Mems ◽  
Fabrication And Characterization

scholarly journals Fabrication and Characterization of Capacitive RF MEMS Perforated Switch

IEEE Access ◽  
2018 ◽  
Vol 6 ◽  
pp. 77519-77528 ◽  
Author(s):  
K. Srinivasa Rao ◽  
Lakshmi Narayana Thalluri ◽  
Koushik Guha ◽  
K. Girija Sravani
Keyword(s):  
Rf Mems ◽  
Fabrication And Characterization

Design, fabrication and characterization of miniature RF MEMS switched capacitor based phase shifter

2014 ◽  
Vol 45 (8) ◽  
pp. 1093-1102 ◽  
Author(s):  
Amrita Chakraborty ◽  
Bhaskar Gupta ◽  
Binay Kumar Sarkar
Keyword(s):  
Phase Shifter ◽  
Rf Mems ◽  
Switched Capacitor ◽  
Fabrication And Characterization

scholarly journals Fabrication and characterization of PECVD silicon nitride for RF MEMS applications

2012 ◽  
Vol 19 (1) ◽  
pp. 131-136 ◽  
Author(s):  
H. U. Rahman ◽  
B. C. Johnson ◽  
J. C. Mccallum ◽  
E. Gauja ◽  
R. Ramer
Keyword(s):  
Silicon Nitride ◽  
Rf Mems ◽  
Fabrication And Characterization

Fabrication and characterization of ohmic contacting RF MEMS switches

2004 ◽  
Author(s):  
Christopher W. Dyck ◽  
Thomas A. Plut ◽  
Christopher D. Nordquist ◽  
Patrick S. Finnegan ◽  
Franklin Austin ◽  
...  
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches ◽  
Fabrication And Characterization

Fabrication and Characterisation of Polysilicon-Based Clamped-Clamped Filter

2011 ◽  
Vol 483 ◽  
pp. 112-116
Author(s):  
Yong Mei Zhao ◽  
Jin Ning ◽  
Guo Wei Han ◽  
Chao Wei Si
Keyword(s):  
Rapid Growth ◽  
Bandpass Filter ◽  
Rf Mems ◽  
Center Frequency ◽  
Rf Filter ◽  
Mems Resonator ◽  
Fabrication And Characterization ◽  
Mems Filter

The rapid growth of micromaching technology makes the miniaturized or integrated MEMS resonator or filter become possible. This paper reports on the fabrication and characterization of the polysilicon-based RF MEMS filter, comprised of the two clamped-clamped resonators coupled with the micro dimensions beam. The surface micromaching technology has been adopted to fabricate the clamped-clamped filter. The fabricating process and the optimization of the typical micromaching process for the MEMS RF filter are illustrated in detail. After the fabrication, the resonating characteristics are measured. The center frequency of 30 MHz of the micromechanical bandpass filter is demonstrated.

Fabrication and characterization of RF-MEMS switch in V-band

2009 ◽  
Author(s):  
Thanh Mai Vu ◽  
Gaetan Prigent ◽  
Jinyu Ruan ◽  
Alexandre Rumeau ◽  
Patrick Pons ◽  
...  
Keyword(s):  
Rf Mems ◽  
Rf Mems Switch ◽  
Mems Switch ◽  
V Band ◽  
Fabrication And Characterization
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