Fabrication and characterization of thin-film silicon resonators on 10 $\boldsymbol{{\mu}}$m-thick polyimide substrates
2020 ◽
Vol 30
(4)
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pp. 045007
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1977 ◽
Vol 24
(4)
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pp. 446-449
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2007 ◽
Vol 138
(2)
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pp. 329-334
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2005 ◽
Vol 14
(5)
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pp. 1167-1177
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2017 ◽
Vol 5
(1)
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pp. 1-7
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