Fabrication and characterization of thin-film silicon resonators on 10 $\boldsymbol{{\mu}}$m-thick polyimide substrates

2020 ◽  
Vol 30 (4) ◽  
pp. 045007 ◽  
Author(s):  
Tiago G Pestana ◽  
Rui M R Pinto ◽  
Rosana A Dias ◽  
Marco Martins ◽  
Virginia Chu ◽  
...  
2018 ◽  
Author(s):  
F. Welatta ◽  
A. El Kissani ◽  
M. Aggour ◽  
A. Outzourhit

2017 ◽  
Vol 5 (1) ◽  
pp. 1-7 ◽  
Author(s):  
Haruto Maruhashi ◽  
Takeo Oku ◽  
Atsushi Suzuki ◽  
Tsuyoshi Akiyama ◽  
Yasuhiro Yamasaki

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