scholarly journals Maskless and contactless patterned silicon deposition using a localized PECVD process

2020 ◽  
Vol 29 (2) ◽  
pp. 025023
Author(s):  
Ronan Leal ◽  
Bastien Bruneau ◽  
Pavel Bulkin ◽  
Tatiana Novikova ◽  
François Silva ◽  
...  
Keyword(s):  
Silicon Deposition

2D and 1D modeling of AMT barrel reactors for silicon deposition

1999 ◽  
Vol 09 (PR8) ◽  
pp. Pr8-273-Pr8-280
Author(s):  
M. Masi ◽  
C. Cavallotti ◽  
S. Carrà ◽  
D. Crippa ◽  
G. Vaccari
Keyword(s):  
Silicon Deposition ◽  
1D Modeling

Modelling of a new parallel-flow CVD reactor for low pressure silicon deposition

1992 ◽  
Vol 47 (9-11) ◽  
pp. 2921-2926 ◽  
Author(s):  
S. Bismo ◽  
P. Duverneuil ◽  
L. Pibouleau ◽  
S. Domenech ◽  
J.P. Couderc
Keyword(s):  
Low Pressure ◽  
Parallel Flow ◽  
Silicon Deposition

scholarly journals CONVECTION AND CHEMISTRY EFFECTS IN CVD - A 3-D ANALYSIS FOR SILICON DEPOSITION

1989 ◽  
Vol 50 (C5) ◽  
pp. C5-17-C5-34 ◽  
Author(s):  
S. A. GOKOGLU ◽  
M. KUCZMARSKI ◽  
P. TSUI ◽  
A. CHAIT
Keyword(s):  
Silicon Deposition

scholarly journals SILICON DEPOSITION FROM DISILANE : EXPERIMENTAL STUDY AND MODELLING

1991 ◽  
Vol 02 (C2) ◽  
pp. C2-63-C2-70 ◽  
Author(s):  
M. GUEYE ◽  
E. SCHEID ◽  
P. TAURINES ◽  
P. DUVERNEUIL ◽  
D. BIELLE-DASPET ◽  
...  
Keyword(s):  
Experimental Study ◽  
Silicon Deposition

scholarly journals Silicon Deposition on a Rotating Disk

1980 ◽  
Vol 127 (3) ◽  
pp. 744-752 ◽  
Author(s):  
Richard Pollard ◽  
John Newman
Keyword(s):  
Rotating Disk ◽  
Silicon Deposition
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