Non-Equilibrium behavior of dopants during epitaxial silicon deposition using silane
1972 ◽
Vol 1
(3)
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pp. 371-380
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1988 ◽
Vol 60
(12)
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pp. 1841-1864
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2009 ◽
Vol 2009
(08)
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pp. L08001
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Keyword(s):
1985 ◽
Vol 49
(3)
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pp. 877-888
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