A Binary-Encounter-Bethe approach to compute electron-impact partial ionization cross sections of plasma relevant molecules like Hexamethyldisiloxane and Silane

2021 ◽  
Author(s):  
Ajay Kumar Arora ◽  
Krishna Kumar Gupta ◽  
Kanupriya Goswami ◽  
Anand Bharadvaja ◽  
K L Baluja
Keyword(s):  
Mass Spectrometry ◽  
Electron Impact ◽  
Cross Sections ◽  
Mass Spectrometry Data ◽  
Ionization Cross ◽  
Total Ionization ◽  
Order Of Magnitude ◽  
Ionization Cross Sections ◽  
Theoretical Results ◽  
Binary Encounter

Abstract The electron-impact partial ionization cross sections (PICS) of the fragments are reported from threshold to 5~keV energy using the modified form of the binary-encounter-Bethe model. The scaling using mass spectrometry data ensures that the cross sections are of correct order of magnitude. The total ionization cross sections (TICS) were obtained by summing the PICS of fragments. The PICS and TICS obtained from the modified-binary-encounter-Bethe model are in excellent agreement with the experimental results and theoretical results. The molecules investigated are hexamethyldisiloxane (HMDSO) and silane. Both these species are highly relevant in plasma processing where the PICS are required over an extended energy range. The study of ionization process in conjunction with mass spectrometry provides correct estimates of the contribution that each charged ion makes to the TICS. The present approach can be easily extended to any species provided ion energetics, and relative cation abundances data are available.

scholarly journals The Electron Impact Ionization Cross Sections of Methanol, Ethanol and 1-Propanol

Atoms ◽  
2019 ◽  
Vol 7 (3) ◽  
pp. 60 ◽  
Author(s):  
Yogesh Kumar ◽  
Manoj Kumar ◽  
Sachin Kumar ◽  
Rajeev Kumar
Keyword(s):  
Electron Impact ◽  
Cross Sections ◽  
Impact Ionization ◽  
Experimental Results ◽  
Oscillator Strengths ◽  
Ionization Cross ◽  
Total Ionization ◽  
Plane Wave Born Approximation ◽  
Ionization Cross Sections ◽  
Good Agreement

In the present investigation, the plane-wave Born approximation was employed to calculate the total ionization cross sections by electron impact of methanol, ethanol and 1-propanol from the threshold of ionization to 10 MeV. This method requires continuum generalized oscillator strengths (CGOSs). The two different semi-phenomenological expressions of CGOS, given by Mayol and Salvat and Weizsacker and Williams, along with approximated form of the continuum optical oscillator strength (COOS) by Khare et al. were used. Furthermore, the average of the above two CGOSs was also used. The calculated ionization cross sections were compared to the available previous theoretical results and experimental data. Out of three CGOSs, the present results with the average CGOS were found in good agreement with the available experimental results for all the considered molecules. Collision parameters CRP were also calculated from 0.1 to 100 MeV and the calculations were found to be in excellent agreement with the experimental results of Reike and Prepejchal.

Electron-impact total ionization cross sections of CF4, C2F6, and C3F8

1999 ◽  
Vol 110 (8) ◽  
pp. 3811-3822 ◽  
Author(s):  
H. Nishimura ◽  
Winifred M. Huo ◽  
M. A. Ali ◽  
Yong-Ki Kim
Keyword(s):  
Electron Impact ◽  
Cross Sections ◽  
Ionization Cross ◽  
Total Ionization ◽  
Ionization Cross Sections
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