Epitaxial ZnO gate dielectrics deposited by RF sputter for AlGaN/GaN metal-oxide-semiconductor high-electron-mobility transistors

2017 ◽  
Vol 33 (1) ◽  
pp. 015007 ◽  
Author(s):  
Seonno Yoon ◽  
Seungmin Lee ◽  
Hyun-Seop Kim ◽  
Ho-Young Cha ◽  
Hi-Deok Lee ◽  
...  
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