Comparison of Terahertz time domain spectroscopy and laser Thomson scattering for electron density measurements in inductively coupled plasma discharges

2019 ◽  
Vol 14 (12) ◽  
pp. C12019-C12019
Author(s):  
Y. Zhao ◽  
Y. Wang ◽  
J. Shi ◽  
D. Wu ◽  
C. Feng ◽  
...  
Keyword(s):  
Electron Density ◽  
Time Domain ◽  
Inductively Coupled Plasma ◽  
Thomson Scattering ◽  
Plasma Discharges ◽  
Terahertz Time Domain Spectroscopy ◽  
Time Domain Spectroscopy ◽  
Density Measurements ◽  
Inductively Coupled

scholarly journals Electron density measurement of inductively coupled plasmas by terahertz time-domain spectroscopy (THz-TDS)

2011 ◽  
Vol 110 (7) ◽  
pp. 073303 ◽  
Author(s):  
Ayumi Ando ◽  
Tomoko Kurose ◽  
Vivien Reymond ◽  
Katsuhisa Kitano ◽  
Hideaki Kitahara ◽  
...  
Keyword(s):  
Electron Density ◽  
Time Domain ◽  
Density Measurement ◽  
Inductively Coupled Plasmas ◽  
Terahertz Time Domain Spectroscopy ◽  
Time Domain Spectroscopy ◽  
Inductively Coupled ◽  
Coupled Plasmas

scholarly journals Electron density measurement for plasmas by terahertz time-domain spectroscopy

2010 ◽  
Vol 227 ◽  
pp. 012016 ◽  
Author(s):  
A Ando ◽  
H Kitahara ◽  
T Kurose ◽  
K Kitano ◽  
K Takano ◽  
...  
Keyword(s):  
Electron Density ◽  
Time Domain ◽  
Density Measurement ◽  
Terahertz Time Domain Spectroscopy ◽  
Time Domain Spectroscopy
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