In situ analysis of carrier lifetime and barrier capacitance variations in silicon during 1.5 MeV protons implantation
2011 ◽
Vol 6
(09)
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pp. P09002-P09002
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2020 ◽
Keyword(s):
2016 ◽
1971 ◽
Vol 36
(7)
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pp. 2568-2580
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Keyword(s):
Keyword(s):
2017 ◽
Vol 17
(8)
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pp. 1094-1099
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