Power characteristics of multiple inductively coupled RF discharges inside a metallic chamber

Plasma Science and Technology ◽

10.1088/2058-6272/ac363f ◽

2021 ◽

Author(s):

Dane Lojen ◽

Rok Zaplotnik ◽

Miran Mozetic ◽

Alenka Vesel ◽

Gregor Primc

Keyword(s):

Inductively Coupled ◽

Power Characteristics ◽

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Characterization of stationary and pulsed inductively coupled RF discharges for plasma sterilization

Plasma Physics and Controlled Fusion ◽

10.1088/0741-3335/47/5a/026 ◽

2005 ◽

Vol 47 (5A) ◽

pp. A353-A360 ◽

Author(s):

T Gans ◽

M Osiac ◽

D O'Connell ◽

V A Kadetov ◽

U Czarnetzki ◽

...

Keyword(s):

Inductively Coupled ◽

Plasma Sterilization ◽

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Radial profiles of oxygen atoms in an inductively coupled oxygen RF discharges

The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. ◽

10.1109/plasma.2003.1228938 ◽

2003 ◽

Author(s):

H.J. Yoon ◽

M.J. Lee ◽

C.J. Chung ◽

T.H. Chung

Keyword(s):

Inductively Coupled ◽

Rf Discharges ◽

Radial Profiles ◽

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Fast two‐dimensional self‐consistent kinetic modeling of low‐pressure inductively coupled RF discharges

Applied Physics Letters ◽

10.1063/1.112050 ◽

1994 ◽

Vol 65 (11) ◽

pp. 1355-1357 ◽

Author(s):

U. Kortshagen ◽

L. D. Tsendin

Keyword(s):

Kinetic Modeling ◽

Low Pressure ◽

Two Dimensional ◽

Inductively Coupled ◽

Rf Discharges ◽

Self Consistent

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Ion energy and angular distributions in inductively coupled Argon RF discharges

10.2172/212756 ◽

1996 ◽

Author(s):

J.R. Woodworth ◽

M.E. Riley ◽

D.C. Meister

Keyword(s):

Angular Distributions ◽

Inductively Coupled ◽

Rf Discharges ◽

Energy And Angular Distributions

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Ion energy distribution functions in inductively coupled RF discharges in mixtures of chlorine and boron trichloride

10.2172/463640 ◽

1997 ◽

Author(s):

J.R. Woodworth ◽

C.A. Nichols ◽

T.W. Hamilton

Keyword(s):

Energy Distribution ◽

Distribution Functions ◽

Boron Trichloride ◽

Ion Energy Distribution ◽

Inductively Coupled ◽

Rf Discharges ◽

Energy Distribution Functions

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A global model for the inductively coupled rf discharges in Ar/H2 mixture

PRZEGLĄD ELEKTROTECHNICZNY ◽

10.15199/48.2021.01.06 ◽

2021 ◽

Vol 1 (1) ◽

pp. 32-38

Author(s):

Hocine TEBANI

Keyword(s):

Global Model ◽

Inductively Coupled ◽

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Formation Of Carbon Oxides In CH4/O2 Plasmas Produced By Inductively Coupled RF Discharges At Low Pressure

10.1063/1.1593864 ◽

2003 ◽

Author(s):

Ivonne Möller

Keyword(s):

Low Pressure ◽

Carbon Oxides ◽

Inductively Coupled ◽

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Kinetics and radiative processes in Xe/I/sub 2/ inductively coupled RF discharges at low pressure

IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science ◽

10.1109/plasma.1996.551526 ◽

2002 ◽

Author(s):

P.N. Barnes ◽

J.T. Verdeyen ◽

M.J. Kushner

Keyword(s):

Low Pressure ◽

Inductively Coupled ◽

Radiative Processes ◽

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Investigation of the radial uniformity of planar inductively coupled RF discharges using a self-consistent two-dimensional kinetic model

International Conference on Plasma Science (papers in summary form only received) ◽

10.1109/plasma.1995.531541 ◽

1995 ◽

Author(s):

U. Kortshagen

Keyword(s):

Kinetic Model ◽

Two Dimensional ◽

Inductively Coupled ◽

Rf Discharges ◽

Self Consistent

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Inductively-coupled dusty plasma

Journal de Physique IV (Proceedings) ◽

10.1051/jp4:2000577 ◽

2000 ◽

Vol 10 (PR5) ◽

pp. Pr5-399-Pr5-402

Author(s):

V. E. Fortov ◽

A. P. Nefedov ◽

V. A. Sinel'shchikov ◽

A. V. Zobnin ◽

A. D. Usachev

Keyword(s):

Dusty Plasma ◽

Inductively Coupled

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