A global model for the inductively coupled rf discharges in Ar/H2 mixture

2021 ◽  
Vol 1 (1) ◽  
pp. 32-38
Author(s):  
Hocine TEBANI
Keyword(s):  
Global Model ◽  
Inductively Coupled ◽  
Rf Discharges

Global model analysis of Ar inductively coupled plasma driven by a 150 kHz-band high-power pulse burst

2019 ◽  
Vol 58 (SA) ◽  
pp. SAAB06
Author(s):  
Yuma Saito ◽  
Kodai Shibata ◽  
Katsuyuki Takahashi ◽  
Seiji Mukaigawa ◽  
Koichi Takaki ◽  
...  
Keyword(s):  
High Power ◽  
Inductively Coupled Plasma ◽  
Model Analysis ◽  
Global Model ◽  
Pulse Burst ◽  
Inductively Coupled ◽  
Power Pulse ◽  
High Power Pulse

Studies about Flow Rate Effect on Atomic Fluorine Generation in Inductively Coupled CF4 Plasmas: A Global Model Investigation

2019 ◽  
Vol 31 (1) ◽  
pp. 125-134
Author(s):  
Rodrigo S. Pessoa ◽  
Sergio W. Parada ◽  
Mariana A. Fraga ◽  
Marisa Roberto ◽  
Homero S. Maciel ◽  
...  
Keyword(s):  
Flow Rate ◽  
Rate Effect ◽  
Global Model ◽  
Model Investigation ◽  
Inductively Coupled ◽  
Atomic Fluorine ◽  
Flow Rate Effect

Global model and diagnostic of a low-pressure SF6/Ar inductively coupled plasma

2009 ◽  
Vol 18 (2) ◽  
pp. 025001 ◽  
Author(s):  
L Lallement ◽  
A Rhallabi ◽  
C Cardinaud ◽  
M C Peignon-Fernandez ◽  
L L Alves
Keyword(s):  
Inductively Coupled Plasma ◽  
Low Pressure ◽  
Global Model ◽  
Inductively Coupled

Applicability of self-consistent global model for characterization of inductively coupled Cl2 plasma

Vacuum ◽  
2007 ◽  
Vol 81 (5) ◽  
pp. 669-675 ◽  
Author(s):  
A.M. Efremov ◽  
Gwan-Ha Kim ◽  
Jong-Gyu Kim ◽  
A.V. Bogomolov ◽  
Chang-Il Kim
Keyword(s):  
Global Model ◽  
Inductively Coupled ◽  
Self Consistent
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