Fabrication of Diamond-Like Carbon Nanosprings by Focused-Ion-Beam Chemical Vapor Deposition and Evaluation of Their Mechanical Characteristics

2007 ◽  
Vol E90-C (1) ◽  
pp. 41-45
Author(s):  
K. NAKAMATSU ◽  
M. NAGASE ◽  
T. ICHIHASHI ◽  
K. KANDA ◽  
Y. HARUYAMA ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Mechanical Characteristics ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Diamond Like Carbon

Thermal Durability of Diamond Like Carbon Films Containing Tungsten Fabricated by Focused-Ion-Beam Chemical Vapor Deposition

2012 ◽  
Vol 51 (6S) ◽  
pp. 06FD07 ◽  
Author(s):  
Akihiro Fujimoto ◽  
Makoto Okada ◽  
Yuji Kang ◽  
Masahito Niibe ◽  
Shinji Matsui ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Thermal Durability

Elementary Analysis of Diamond-Like Carbon Film Formed by Focused-Ion-Beam Chemical Vapor Deposition

2007 ◽  
Vol 46 (12) ◽  
pp. 8003-8004 ◽  
Author(s):  
Jun-ya Igaki ◽  
Akihiko Saikubo ◽  
Reo Kometani ◽  
Kazuhiro Kanda ◽  
Tsuneo Suzuki ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Carbon Film ◽  
Chemical Vapor ◽  
Diamond Like Carbon ◽  
Diamond Like Carbon Film ◽  
Elementary Analysis

Mechanical Characteristics of Nanosprings Fabricated by Focused-Ion-Beam Chemical Vapor Deposition Using Ferrocene Source Gas

2010 ◽  
Vol 49 (6) ◽  
pp. 06GH07 ◽  
Author(s):  
Yasuki Nakai ◽  
Yuji Kang ◽  
Makoto Okada ◽  
Yuichi Haruyama ◽  
Kazuhiro Kanda ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Mechanical Characteristics ◽  
Ion Beam ◽  
Chemical Vapor
Sign in / Sign up

Export Citation Format

Share Document