Thermal Durability of Diamond Like Carbon Films Containing Tungsten Fabricated by Focused-Ion-Beam Chemical Vapor Deposition

2012 ◽  
Vol 51 (6S) ◽  
pp. 06FD07 ◽  
Author(s):  
Akihiro Fujimoto ◽  
Makoto Okada ◽  
Yuji Kang ◽  
Masahito Niibe ◽  
Shinji Matsui ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Thermal Durability

Thermal Durability of Diamond Like Carbon Films Containing Tungsten Fabricated by Focused-Ion-Beam Chemical Vapor Deposition

2012 ◽  
Vol 51 ◽  
pp. 06FD07
Author(s):  
Akihiro Fujimoto ◽  
Makoto Okada ◽  
Yuji Kang ◽  
Masahito Niibe ◽  
Shinji Matsui ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Thermal Durability

Annealing Effect of W Incorporated Diamond-Like Carbon Fabricated by Ga Focused Ion Beam Chemical Vapor Deposition

2011 ◽  
Vol 50 (6S) ◽  
pp. 06GG05 ◽  
Author(s):  
Akira Wada ◽  
Tsuneo Suzuki ◽  
Masahito Niibe ◽  
Haruhiko Ito ◽  
Kazuhiro Kanda
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Annealing Effect ◽  
Diamond Like Carbon

scholarly journals Microstructure Analysis of Diamond-Like Carbon Produced by Focused Ion Beam Assisted Chemical Vapor Deposition

2005 ◽  
Vol 71 (11) ◽  
pp. 1383-1387 ◽  
Author(s):  
Naomichi SAKAMOTO ◽  
Yasuo KOGO ◽  
Takuya YASUNO ◽  
Takahiro YAGI ◽  
Jun TANIGUCHI ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Microstructure Analysis ◽  
Diamond Like Carbon

Elementary Analysis of Diamond-Like Carbon Film Formed by Focused-Ion-Beam Chemical Vapor Deposition

2007 ◽  
Vol 46 (12) ◽  
pp. 8003-8004 ◽  
Author(s):  
Jun-ya Igaki ◽  
Akihiko Saikubo ◽  
Reo Kometani ◽  
Kazuhiro Kanda ◽  
Tsuneo Suzuki ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Carbon Film ◽  
Chemical Vapor ◽  
Diamond Like Carbon ◽  
Diamond Like Carbon Film ◽  
Elementary Analysis

Deposition Yield and Physical Properties of Carbon Films Deposited by Focused-Ion-Beam Chemical Vapor Deposition

2010 ◽  
Vol 49 (6) ◽  
pp. 06GH08
Author(s):  
Takashi Kaito ◽  
Hiroshi Oba ◽  
Yasuhiko Sugiyama ◽  
Anto Yasaka ◽  
Jun-ichi Fujita ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Physical Properties ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Deposition Yield

Concurrent synthesis and boron-doping of amorphous carbon films by focused ion beam-assisted chemical vapor deposition

2021 ◽  
pp. 138704
Author(s):  
Ryo Matsumoto ◽  
El Hadi S. Sadki ◽  
Hiromi Tanaka ◽  
Sayaka Yamamoto ◽  
Shintaro Adachi ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Amorphous Carbon ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Boron Doping ◽  
Carbon Films ◽  
Amorphous Carbon Films

Effect of Annealing on Implanted Ga of Diamond-Like Carbon Thin Films Fabricated by Focused-Ion-Beam Chemical Vapor Deposition

2008 ◽  
Vol 47 (12) ◽  
pp. 9010-9012 ◽  
Author(s):  
Takahiro Nagata ◽  
Yoshiki Sakuma ◽  
Masamitsu Haemori ◽  
Kiyomi Nakajima ◽  
Reo Kometani ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Diamond Like Carbon ◽  
Carbon Thin Films
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