Principal component based k-nearest-neighbor rule for semiconductor process fault detection

Author(s):  
Q. Peter He ◽  
Jin Wang
2021 ◽  
Vol 17 (11) ◽  
pp. 155014772110559
Author(s):  
Zelin Ren ◽  
Yongqiang Tang ◽  
Wensheng Zhang

The fault diagnosis approaches based on k-nearest neighbor rule have been widely researched for industrial processes and achieve excellent performance. However, for quality-related fault diagnosis, the approaches using k-nearest neighbor rule have been still not sufficiently studied. To tackle this problem, in this article, we propose a novel quality-related fault diagnosis framework, which is made up of two parts: fault detection and fault isolation. In the fault detection stage, we innovatively propose a novel non-linear quality-related fault detection method called kernel partial least squares- k-nearest neighbor rule, which organically incorporates k-nearest neighbor rule with kernel partial least squares. Specifically, we first employ kernel partial least squares to establish a non-linear regression model between quality variables and process variables. After that, the statistics and thresholds corresponding to process space and predicted quality space are appropriately designed by adopting k-nearest neighbor rule. In the fault isolation stage, in order to match our proposed non-linear quality-related fault detection method kernel partial least squares- k-nearest neighbor seamlessly, we propose a modified variable contributions by k-nearest neighbor (VCkNN) fault isolation method called modified variable contributions by k-nearest neighbor (MVCkNN), which elaborately introduces the idea of the accumulative relative contribution rate into VC k-nearest neighbor, such that the smearing effect caused by the normal distribution hypothesis of VC k-nearest neighbor can be mitigated effectively. Finally, a widely used numerical example and the Tennessee Eastman process are employed to verify the effectiveness of our proposed approach.


Author(s):  
Deepam Goyal ◽  
S.S. Dhami ◽  
B.S. Pabla

Abstract Accelerometers, used as vibration pickups in machine health monitoring systems, need physical connection to the machine tool through cables, complicating physical systems. A non-contact laser based vibration sensor has been developed and used for bearing health monitoring in this paper. The vibration data has been acquired under speed and load variation. Hilbert transform (HT) has been applied for denoising the vibration signal. An extraction of condition monitoring indicators from both raw as well as envelope signals has been made; and the dimensionality of these extracted indicators was deducted with Principal Component Analysis (PCA). Sequential Floating Forward Selection (SFFS) method has been implemented for ranking the selected indicators in order of significance for reduction in the input vector size and for finalizing the most optimal indicator set. Finally, the selected indicators are passed to k-nearest neighbor (kNN) and weighted kNN (WkNN) for diagnosing the bearing defects. The comparative analysis of the effectiveness of kNN and WkNN has been executed. It is evident from the experimental results that, the vibration signals obtained from developed non-contact sensor compare adequately with the accelerometer data obtained under similar conditions. The performance of WkNN has been found to be slower as compared to kNN. The proposed fault detection methodology compares very well with the other reported methods in the literature. The non-contact fault detection methodology has an enormous potential for automatic recognition of defects in the machine which can provide early signals to avoid catastrophic failure and unplanned equipment shutdowns.


Author(s):  
Zhu Siyu ◽  
He Chongnan ◽  
Song Mingjuan ◽  
Li Linna

In response to the frequent counterfeiting of Wuchang rice in the market, an effective method to identify brand rice is proposed. Taking the near-infrared spectroscopy data of a total of 373 grains of rice from the four origins (Wuchang, Shangzhi, Yanshou, and Fangzheng) as the observations, kernel principal component analysis(KPCA) was employed to reduce the dimensionality, and Fisher discriminant analysis(FDA) and k-nearest neighbor algorithm (KNN) were used to identify brand rice respectively. The effects of the two recognition methods are very good, and that of KNN is relatively better. Howerver the shortcomings of KNN are obvious. For instance, it has only one test dimension and its test of samples is not delicate enough. In order to further improve the recognition accuracy, fuzzy k-nearest neighbor set is defined and fuzzy probability theory is employed to get a new recognition method –Two-Parameter KNN discrimination method. Compared with KNN algorithm, this method increases the examination dimension. It not only examines the proportion of the number of samples in each pattern class in the k-nearest neighbor set, but also examines the degree of similarity between the center of each pattern class and the sample to be identified. Therefore, the recognition process is more delicate and the recognition accuracy is higher. In the identification of brand rice, the discriminant accuracy of Two-Parameter KNN algorithm is significantly higher than that of FDA and that of KNN algorithm.


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