Evolution of relief of asperited polycrystalline silicon surface in the process of thermal oxidation

2002 ◽  
Author(s):  
G.V. Perov ◽  
E.G. Salman ◽  
A.N. Ignatov
Keyword(s):  
Thermal Oxidation ◽  
Polycrystalline Silicon ◽  
Silicon Surface

Optical characterization of polycrystalline silicon before and after thermal oxidation

1985 ◽  
Vol 125 (3-4) ◽  
pp. 235-241 ◽  
Author(s):  
P. Montaudon ◽  
M.H. Debroux ◽  
F. Ferrieu ◽  
A. Vareille
Keyword(s):  
Thermal Oxidation ◽  
Polycrystalline Silicon ◽  
Optical Characterization ◽  
Before And After

Crystal structure and thermal oxidation of laser‐recrystallized polycrystalline silicon

1980 ◽  
Vol 36 (7) ◽  
pp. 550-553 ◽  
Author(s):  
T. I. Kamins ◽  
K. F. Lee ◽  
J. F.. Gibbons
Keyword(s):  
Crystal Structure ◽  
Thermal Oxidation ◽  
Polycrystalline Silicon

Rapid thermal oxidation of radio frequency sputtered polycrystalline silicon germanium films

2002 ◽  
Vol 91 (4) ◽  
pp. 2443-2448 ◽  
Author(s):  
W. K. Choi ◽  
A. Natarajan ◽  
L. K. Bera ◽  
A. T. S. Wee ◽  
Y. J. Liu
Keyword(s):  
Radio Frequency ◽  
Thermal Oxidation ◽  
Silicon Germanium ◽  
Polycrystalline Silicon ◽  
Rapid Thermal Oxidation ◽  
Germanium Films
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